Abstract
In the hypersonic plasma particle deposition process, vapor phase reactants are injected into a plasma and rapidly quenched in a supersonic nozzle, leading to nucleation of nanosize particles. These particles impact a substrate at high velocity, forming a coating with grain sizes of 10 to 40 nm. As previously reported, coatings of a variety of materials have been obtained, including silicon, silicon carbide, titanium carbide and nitride, and composites of these, all deposited at very high rates. Recent studies have shown that slight modifications of the process can result in nanosize structures consisting of single crystal silicon nanowires covered with nanoparticles. These nanowires are believed to grow in a vapor deposition process, catalyzed by the presence of titanium in the underlying nanoparticle film. However, simultaneously nanoparticles are nucleated in the nozzle and deposited on the nanowires, leading to structures that are the result of a plasma chemical vapor deposition (CVD) process combined with a nanoparticle spray process. The combination of these two process paths opens new dimensions in the nanophase materials processing area.
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S.L. Girshick, J.V.R. Heberlein, P.H. McMurry, W.W. Gerberich, D.I. Iordanoglou, N.P. Rao, A. Gidwani, N. Tymiak, F.D. Fonzo, M.H. Fan, Hypersonic Plasma Particle Deposition of Nanocrystalline Coatings,Innovative Processing of Films and Nanocrystalline Powders, K.L. Choy, Ed., Imperial College Press (London), 2002, p 165–191
N.P. Rao, N. Tymiak, J. Blum, A. Neuman, H.J. Lee, S.L. Girshick, P.H. McMurry, and J. Heberlein, Hypersonic Plasma Particle Deposition of Nanostructured Silicon and Silicon Carbide,J. Aerosol Sci., 1998,29, p 707–720
X. Wang, J. Hafiz, R. Mukherjee, T. Renault, J. Heberlein, S.L. Girshick, and P.H. McMurry, System for In-situ Characterization of Nanoparticles Synthesized in a Thermal Plasma Process,Plasma Chem. Plasma Process., 2005,25, p 439–453
S. Nakahara, Recent Developments in a TEM Specimen Preparation Technique Using FIB for Semiconductor Devices,Surf. Coat. Technol., 2003,169–170, p 721–727
S. Veprek and A.S. Argon, Mechanical Properties of Superhard Nanocomposites,Surf. Coat. Technol., 2001,146–147, p 175–182
A. Niederhofer, P. Nesladek, H.-D. Mannling, K. Moto, S. Veprek, and M. Jilek, Structural Properties, Internal Stress and Thermal Stability of nc-TiN/a-Si3N4, nc-TiN/TiSi x and nc-(Ti1−y Al y Si x )N Superhard Nanocomposite Coatings Reaching the Hardness of Diamond,Surf. Coat. Technol., 1999,120–121, p 173–178
S. Veprek and M. Jilek, Super and Ultrahard Nanocomposite Coatings: Generic Concept for their Preparation, Properties and Industrial Applications,Vacuum, 2002,67, p 443–449
M. Dayan, M. Shengli, X. Kewei, and S. Veprek, Effect of Oxygen and Chlorine on Nano-structured TiN/Si3N4 Film Hardness,Mater. Lett., 2005,59, p 838–841
P. Liu, P.J. Ziemann, D.B. Kittelson, and P.H. McMurry, Generating Particle Beams of Controlled Dimensions and Divergence I. Theory of Particle Motion in Aerodynamic Lenses and Nozzle Expansions,Aerosol Sci. Technol., 1995,22, p 293–313
P. Liu, P.J. Ziemann, D.B. Kittelson, and P.H. McMurry, Generating Particle Beams of Controlled Dimensions and Divergence II. Experimental Evaluation of Particle Motion in Aerodynamic Lenses and Nozzle Expansions,Aerosol Sci. Technol., 1995,22, p 314–324
F.D. Fonzo, A. Gidwani, M.H. Fan, D. Neumann, D.I. Iordanoglou, J.V.R. Heberlein, P.H. McMurry, S.L. Girshick, N. Tymiak, W.W. Gerberich, et al., Focused Nanoparticle Beam Deposition of Patterned Microstructures,Appl. Phys. Lett., 2000,77, p 910–912
A. Gidwani, “Studies of Flow and Particle Transport in Hypersonic Plasma Particle Deposition and Aerodynamic Focusing,” Ph.D. Thesis, University of Minnesota, Minneapolis, MN 2003
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This article was originally published inBuilding on 100 Years of Success, Proceedings of the 2006 International Thermal Spray Conference (Seattle, WA), May 15–18, 2006, B.R. Marple, M.M. Hyland, Y.-Ch. Lau, R.S. Lima, and J. Voyer, Ed., ASM International, Materials Park, OH, 2006.
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Hafiz, J., Mukherjee, R., Wang, X. et al. Hypersonic plasma particle deposition—A hybrid between plasma spraying and vapor deposition. J Therm Spray Tech 15, 822–826 (2006). https://doi.org/10.1361/105996306X146802
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DOI: https://doi.org/10.1361/105996306X146802