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Electronic structure of silicon dioxide (a review)

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Abstract

Silicon dioxide amorphous films are the key insulators in silicon integrated circuits. The physical properties of silicon dioxide are determined by the electronic structure of this material. The currently available information on the electronic structure of silicon dioxide has been systematized.

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Authors and Affiliations

  1. Rzhanov Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, pr. Akademika Lavrentieva 13, Novosibirsk, 630090, Russia

    S. S. Nekrashevich & V. A. Gritsenko

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  1. S. S. Nekrashevich
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  2. V. A. Gritsenko
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Correspondence to S. S. Nekrashevich.

Additional information

Original Russian Text © S.S. Nekrashevich, V.A. Gritsenko, 2014, published in Fizika Tverdogo Tela, 2014, Vol. 56, No. 2, pp. 209–223.

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Nekrashevich, S.S., Gritsenko, V.A. Electronic structure of silicon dioxide (a review). Phys. Solid State 56, 207–222 (2014). https://doi.org/10.1134/S106378341402022X

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