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Peculiarities of the Structure and Properties of Thin PZT Films with Strongly Nonuniform Depth–Composition Profiles

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Abstract

Two-layer thin films of lead zirconate titanate (PZT) with lead content in the layers differing by 20% were deposited by RF magnetron sputtering at variable working gas pressure in the system. The phase states, compositions, and dielectric properties of two-layer films obtained with different orders of layer deposition were compared. It is established that the order of deposition significantly influences the conditions of crystallization of the perovskite phase and unipolar properties of PZT films.

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Funding

Experimental part of this investigation was performed using instrumentation of the Center of Collective Use at the Central Research Institute of Structural Materials Prometey (St. Petersburg) and supported by the Ministry of Education and Science of the Russian Federation according to agreement no. 14.595.21.0004, unique identifier RFMEFI59517X0004. The work was partly supported by the Ministry for Education and Science of Russian Federation (Grant No 16.2811.2017/4.6).

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Authors and Affiliations

  1. A.I. Herzen State Pedagogical University of Russia, 191186, St. Petersburg, Russia

    D. M. Dolgintsev, M. V. Staritsyn, V. P. Pronin, E. Yu. Kaptelov, S. V. Senkevich & I. P. Pronin

  2. I.V. Gorynin Central Research Institute of Structural Materials Prometey, National Research Center Kurchatov Institute, 191015, St. Petersburg, Russia

    M. V. Staritsyn

  3. Ioffe Physical Technical Institute, Russian Academy of Sciences, 194021, St. Petersburg, Russia

    E. Yu. Kaptelov, S. V. Senkevich & I. P. Pronin

  4. Peter the Great St. Petersburg Polytechnic University, 195251, St. Petersburg, Russia

    S. A. Nemov

Authors
  1. D. M. Dolgintsev
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  2. M. V. Staritsyn
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  3. V. P. Pronin
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  4. E. Yu. Kaptelov
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  5. S. V. Senkevich
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  6. I. P. Pronin
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  7. S. A. Nemov
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Corresponding author

Correspondence to I. P. Pronin.

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The authors declare that they have no conflict of interest.

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Translated by P. Pozdeev

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Dolgintsev, D.M., Staritsyn, M.V., Pronin, V.P. et al. Peculiarities of the Structure and Properties of Thin PZT Films with Strongly Nonuniform Depth–Composition Profiles. Tech. Phys. Lett. 45, 839–842 (2019). https://doi.org/10.1134/S1063785019080200

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  • DOI: https://doi.org/10.1134/S1063785019080200

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