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Magnetron deposition of molybdenum mirrors and micrometer-thick mirror foil with an ordered columnar nanocrystalline structure

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Abstract

The formation of a molybdenum reflecting coating with a columnar nanocrystalline structure is studied under the condition when molybdenum is deposited by dc magnetron sputtering on single-crystalline molybdenum mirrors (substrates). The coating is found to peel off together with a polishing-induced imperfect amorphous surface layer of the substrate. This effect aids in obtaining a free mirror-like molybdenum foil. When the amorphous imperfect layer is removed from the substrate before deposition, the reflecting mirror coating has a good adhesion to the substrate.

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Original Russian Text © A.V. Rogov, K.Yu. Vukolov, 2006, published in Zhurnal Tekhnicheskoĭ Fiziki, 2006, Vol. 76, No. 4, pp. 109–113.

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Rogov, A.V., Vukolov, K.Y. Magnetron deposition of molybdenum mirrors and micrometer-thick mirror foil with an ordered columnar nanocrystalline structure. Tech. Phys. 51, 499–503 (2006). https://doi.org/10.1134/S1063784206040177

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  • DOI: https://doi.org/10.1134/S1063784206040177

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