Abstract
The formation of a molybdenum reflecting coating with a columnar nanocrystalline structure is studied under the condition when molybdenum is deposited by dc magnetron sputtering on single-crystalline molybdenum mirrors (substrates). The coating is found to peel off together with a polishing-induced imperfect amorphous surface layer of the substrate. This effect aids in obtaining a free mirror-like molybdenum foil. When the amorphous imperfect layer is removed from the substrate before deposition, the reflecting mirror coating has a good adhesion to the substrate.
Similar content being viewed by others
References
V. S. Voitsenya, A. F. Bardamid, A. I. Belyaeva, et al., in Proceedings of the International Conference on Advanced Diagnostics for Magnetic and Inertial Fusion, Varenna, 2001, pp. 285–294.
J. A. Thornton, J. Vac. Sci. Technol. 11, 666 (1974).
A. V. Rogov, K. Yu. Vukolov, A. V. Gorshkov, et al., Vopr. At. Nauki Tekh., No. 2, 39 (2005).
Y. G. Wu, E. H. Cao, Z. S. Wang, et al., Appl. Phys. A 76, 147 (2003).
V. D. Vedenskii and V. P. Ryazankin, Vacuum Technology of Optical Instrument Making (Vysshaya Shkola, Moscow, 1988), p. 51 [in Russian].
Z. Yu. Gotra, Technology of Microelectronic Devices (Radio i Svyaz’, Moscow, 1991), p. 107 [in Russian].
Author information
Authors and Affiliations
Additional information
Original Russian Text © A.V. Rogov, K.Yu. Vukolov, 2006, published in Zhurnal Tekhnicheskoĭ Fiziki, 2006, Vol. 76, No. 4, pp. 109–113.
Rights and permissions
About this article
Cite this article
Rogov, A.V., Vukolov, K.Y. Magnetron deposition of molybdenum mirrors and micrometer-thick mirror foil with an ordered columnar nanocrystalline structure. Tech. Phys. 51, 499–503 (2006). https://doi.org/10.1134/S1063784206040177
Received:
Issue Date:
DOI: https://doi.org/10.1134/S1063784206040177