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Chemical vapor deposition of iron-containing films during the decomposition of trimethylamine borane-ferrocene (or iron pentacarbonyl) mixtures: a thermodynamic modeling

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Abstract

Chemical vapor deposition (CVD) of films of complex composition using trimethylamine borane- ferrocene (or iron pentacarbonyl) mixtures in the systems B-C-N-H-Fe-O and B-C-N-H-Fe at reduced pressures (0.1–10 Torr) in a wide temperature range of 300–1300 K was simulated. The corresponding CVD diagrams were calculated and the regions of formation of the phase complexes BN + Fe + C, BN + Fe2C + C, and BN + Fe2C + FeB + C were determined. Simulation of the systems C-H-Fe-Ar, C-H-Fe-Si-Ar, C-H-Fe-Si-O-Ar, and C-H-Fe-Al-O-Ar during the decomposition of ferrocene on substrates of different nature (Si, SiO2, Al2O3) was carried out. The possibility of formation of transition layers containing (i) iron silicides and silicon carbide on the Si and SiO2 substrates already at low temperatures and (ii) aluminum carbide on the Al2O3 substrate at high temperatures is demonstrated.

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Authors and Affiliations

  1. Nikolaev Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, 3 prosp. Akad. Lavrent’eva, 630090, Novosibirsk, Russian Federation

    V. A. Shestakov & M. L. Kosinova

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  1. V. A. Shestakov
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Correspondence to V. A. Shestakov.

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This paper does not contain descriptions of studies on animals or humans.

The authors declare no competing interests.

Published in Russian in Izvestiya Akademii Nauk. Seriya Khimicheskaya, No. 8, pp. 1446–1453, August, 2021.

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Shestakov, V.A., Kosinova, M.L. Chemical vapor deposition of iron-containing films during the decomposition of trimethylamine borane-ferrocene (or iron pentacarbonyl) mixtures: a thermodynamic modeling. Russ Chem Bull 70, 1446–1453 (2021). https://doi.org/10.1007/s11172-021-3238-8

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