Abstract
Volatile organic compounds (VOCs) including acetone, dichloromethane, ethanol, ethylene glycol, iso-propyl alcohol, and several other aromatic compounds are emitted during the manufacturing processes in electronic industries. These VOCs pose problems to human health and the environment. Stringent environmental legislations imposed by government agencies on VOCs force electronic industries to adopt effective air pollution-treatment methods. This article provides a detailed review of VOCs that are emitted from different processes in the electronic industry, conventional, and current technologies that are used to remove toxic air pollutants and an innovative application of biotechnology for removal of VOCs from electronic industry.
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Abbreviations
- \( As \) :
-
Biolayer surface area per unit volume of biofilter
- C in :
-
Concentration of VOC at the entrance of biofilter
- C :
-
Concentration of VOC in the gas phase at height z along the column
- k 0 :
-
Zero-order reaction rate constant
- \( K \) :
-
Monod constant
- Q :
-
Volumetric flow rate of the air stream
- V B :
-
Volume of the biofilter
- X v :
-
Biofilm density defined as dry weight of the cell per volume if the biofilm
- Y :
-
Amount of biomass produced per amount of VOC consumed
- δ :
-
Active biofilm thickness
- μ m :
-
Maximum specific growth rate
References
Al Marzouqi MH, El Nass MH, Mzrzouk SAM, Al Zarooni MA, Abdullatif N, Fiaz R (2008) Modeling of carbon dioxide absorption in membrane contractors. Sep Purif Technol 62:499–506
Alvarez-Hornos FJ, Gabaldon C, Sovier VM, Marzal P, Penya-roja JM (2009) Mathematical modeling of the biofiltration of ethyl acetate and toluene and their mixture. Biochem Eng J 43:169–177
Baltzis BC, Shareefdeen Z (1993) In: Proceedings of the 86th Annual A&MA Meeting, Paper No. 93-TP-52A.03, Denver, 13–18 June 1993
Bhaumik D, Mujamdar S, Sirkar KK (1998) Absorption of carbon dioxide in a transverse flow hollow fiber membrane module including having a few wraps of fiber mat. J Membr Sci 138:77–82
Blocki SW (1993) Hydrophobic zeolite adsorbent: a proven advancement in solvent separation technology. Environ Process 12:226–230
Chang FT, Lin YC, Bai HL, Pei BS (2003) Adsorption and desorption characteristics of VOCs on the thermal swing honeycomb zeolite concentrator. J Air Waste Manage Assoc 26:188–196
Devinny MA, Dehsusses MA, Webster TS (1999) Biofiltration of air pollution control. Lewis publishers, New York, pp 1–5
Dindore VY, Birlman DWF, Guezebroek FH, Versteeg GF (2004) Membrane solvent selection for carbon dioxide removal using membrane gas liquid contactors. Sep Purif Technol 40:133–145
Gupta A, Crompton D (1993) Choosing the right adsorption medium for VOC control. Met Finish 91:68–72
Gupta A, Stone J (1998) Rotary concentrator followed by thermal or catalytic oxidation—a hybrid approach to economical styrene abatement. In: Proceedings of the international composites EXPO 98, Nashville, Session 11-D, pp 1–5
Herzog Dr (1994) Solvent recovery and waste gas purification with cryogenic processes. Characterization and control of odors and VOCs in process industries. Stud Environ Sci 61:309–319
Hoover CA (1999) Environmental impact of PFC abatement, capture and recycle. SSA J 13:21–26
Khan, Ghoshal (2000) Removal of VOCs from polluted air. J Loss Prevent Proc Ind 13:527–543
Li JL, Chen BH (2005) Review of carbon dioxide absorption using chemical solvents in the hollow fiber membrane contactors. Sep Purif Technol 41:109–122
Lin YC, Chang FT, Bai HL, Pei BS (2004) Control of VOCs emissions by condenser pretreatment in a semiconductor fab. J Hazard Mater 120:9–14
Lu C, Chang K, Hsu S (2004) A model for treating iso-propyl alcohol and acetone mixtures in the trickle bed air biofilter. Pro Biochem 39:1849–1858
Mitsuma Y, Yamauchi H, Hirose T (1998a) Analysis of VOC reversing adsorption and desorption characteristics for actual efficiency prediction for ceramic honeycomb adsorbent. J Chem Eng Jpn 31:253–257
Mitsuma Y, Yamauchi H, Hirose T (1998b) Performance of thermal swing honeycomb VOC concentrator. J Chem Eng Jpn 31:482–484
Module 6 (2010) Air pollutants and control techniques—Volatile Organic Compounds—Control Techniques [internet]. http://www.epa.gov/apti/bces/module6/voc/control/control.htm#thermal. Accessed 29 Jan 2010 [cited 2011 Nov 26]
Mudliar S, Giri B, Padoley K, Satpute D, Dixit R, Bhatt P, Pandey R, Juwakar A, Vaidya A (2010) Bioreactors for the treatment of VOCs and odours—a review. J Environ Manage 91:1039–1054
National Pollutant Inventory (1999) Emission estimation technique manual for the electronics and computer industry
Nukunyaa T, Devinnyb TS, Tsotsis TT (2005) Application of a pore network model to a biofilter treating ethanol vapor. Chem Eng Sci 60:665–675
Obuskovic G, Majumdar S, Sirkar KK (2003) Highly VOC-selective hollow fiber membranes for separation by vapor permeation. J Membr Sci 217:98–116
Park SH, Shin JA, Park HH, Yi GY, Chung KJ, Park HD, Kim KB, Lee IS (2011) Exposure to volatile organic compounds and possibility of exposure to by-product volatile organic compounds in photolithography processes in semiconductor manufacturing factories. Saf Health Work 2:210–217
Pauly H (1999) Alternative chemistries for the chamber clean to reduce PFCs emission. SSA J 14:17–25
Ruddy EN, Carroll LA (1993) Select the best VOC control strategy. Chem Eng Prog 89:28–35
Rui LI, Jun XU, Lianjun W, Jiansheng LI, Xiuyun S (2009) Reduction of VOC emissions by a membrane-based gas absorption process. J Environ Sci 21:1069–1102
Seguin RJ, Madden WC (2001) Improvements in the operation of a VOC abatement device. Semiconductor Fabtech, 13th edn. ICG Publishing, London, pp 99–102
Shareefdeen Z, Shaikh AA (1997) Analysis and comparison of biofilter models. Chem Eng J 65:55–61
Shareefdeen Z, Singh A (2005) Biotechnology for odor and air pollution control. Springer, Berlin, Heidelberg, New York, pp 101–124
Shareefdeen Z, Baltzis BC, Oh YS, Bartha R (1993) Biofiltration of methanol vapor. Biotechnol Bioeng 41:512–524
Shareefdeen Z, Herner B, Webb D, Polenek S, Wilson S (2002) Removing volatile organic emissions (VOC) from a printed circuit board manufacturing facility using pilot and commercial scale biofilters. Environ Prog 21:196–201
Spivey JJ (1988) Recovery of volatile organics from small industrial sources. Environ Prog 7:31–40
Streif T, DePinto G, Dunnigan S, Atherton A (1997) PFC reduction through process and hardware optimization. Semicond Int 20:129–134
Wang WP, Lin HT, Ho CD (2006) An analytical study of laminar concurrent flow gas absorption through a parallel plate gas liquid membrane contactor. J Membr Sci 278:181–189
World Bank (1997) Industrial pollution prevention and abatement: electronics manufacturing. Technical background document. Environment department, Washington, D.C
Worth WF (2000) Further evaluation of two plasma technologies for PFCs emission reduction. SSA J 14:11–19
Zang Q, Cussler EL (1985) Micro porous hollow fibres for the gas absorption I: mass transfer in liquid. J Membr Sci 23:321–332
Zang HY, Wang R, Liang DT, Tay JH (2006) Theoretical and experimental studies of membrane wetting in membrane gas–liquid contacting processes. J Membr Sci 308:162–170
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Babar, Z.B., Shareefdeen, Z. Management and control of air emissions from electronic industries. Clean Techn Environ Policy 16, 69–77 (2014). https://doi.org/10.1007/s10098-013-0594-6
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DOI: https://doi.org/10.1007/s10098-013-0594-6