Abstract
In this work we present a novel technology for tailoring the edges of a polymer sacrificial layer by combining multiple techniques. Standard polymers like Shipley Microposit S1818 for the sacrificial layers and gold as a structural layer have been used for our purposes. As a result, oblique profiles of double clamped bridges have been obtained, characterized by an improved homogeneity of the deposited metal thickness on the edges and by a very good surface planarity.
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Lucibello, A., Proietti, E., Marcelli, R. et al. Smoothing and surface planarization of sacrificial layers in MEMS technology. Microsyst Technol 19, 845–851 (2013). https://doi.org/10.1007/s00542-013-1747-6
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DOI: https://doi.org/10.1007/s00542-013-1747-6