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Monolithic multicomponent integrated circuit with an arc-shape waveguide on Si substrate

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Abstract

The determination to develop high-speed, efficient and versatile micro/nano photonic systems has inspired vast studies on photonic circuits. We demonstrate here a near-ultraviolet (NUV) monolithic multicomponent integrated circuit on Si substrate, including two non-suspended multiple quantum wells diodes (MQW-diodes) and an arc-shape waveguide. The two MQW-diodes which are fabricated by the same process can function as emitter and detector, respectively, and their roles can be switched with each other, because the InGaN/GaN multiple quantum wells, which are employed in the emitter to produce near-ultraviolet light, are also utilized by the detector for photodetection. The arc-shape waveguide which serves as a communication channel between the emitter and the detector can change the light propagation direction by 90°. Due to light confinement structure of the wafer, silicon removal and back GaN etching is avoided, which makes the devices more robust, as well as simplifying the processing flow. Two MQW-diodes can communicate with each other at 100 Mbps via the arc-shape waveguide, and the light signals of 200 Mbps from the emitter can also be detected by a commercial photodiode module via free space, which forms a three-dimensional NUV light communication system. This work paves the way toward comprehensive photonic integration for wide variety of potential applications.

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The data are available from the corresponding author on reasonable request.

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Acknowledgements

This research was funded by China Postdoctoral Science Foundation [Grant Number 2020M681683]; and Innovation Research Foundation of NJIT [Grant Number ZKJ202004].

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Authors and Affiliations

  1. Grünberg Research Centre, Nanjing University of Posts and Telecommunications, Nanjing, 210003, China

    Wei Cai

  2. School of Computer Engineering, Nanjing Institute of Technology, Nanjing, 211167, China

    Wei Cai, Liangbao Jiao, Eryuan Guo & Yukuan Dai

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  1. Wei Cai
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  2. Liangbao Jiao
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Contributions

Wei Cai conceived of the study and designed the study. Eryuan Guo and Yukuan Dai collected the data. Wei Cai and Liangbao Jiao analyzed the data and were involved in writing the manuscript. All authors read and approved the final manuscript.

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Correspondence to Wei Cai.

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Cai, W., Jiao, L., Guo, E. et al. Monolithic multicomponent integrated circuit with an arc-shape waveguide on Si substrate. Appl. Phys. A 129, 378 (2023). https://doi.org/10.1007/s00339-023-06665-3

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