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Precision polishing of the mandrel for X-ray grazing incidence mirrors

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Abstract

Based on chemical-mechanical polishing, a precision polishing method is proposed to accommodate the polishing of the paraboloid surface of the specified mandrel for grazing incidence X-ray mirrors. The influencing factors in the polishing are analyzed to confirm the method complies with the Preston equation and Hertz contact theory. Therefore, the common material removal model based on these two theories is adopted. The effects of processing parameters, such as the force F between the mandrel and the polishing lap, the rotational speed n of the mandrel, and the axial speed va of the polishing lap, on the material removal rate are simulated, respectively. A polishing setup is established to carry out experimental polishing to verify the optimum processing parameters obtained by simulations and previous polishing tests. Besides, the effect of abrasive particle size on the roughness is also verified. The roughness of the polished mandrel is measured at different positions, and the optimum roughness reaches Ra 0.659 nm. The polishing approach can significantly reduce the surface roughness of the replication mandrel, satisfying the low energy band focusing requirement of grazing incidence X-ray mirrors.

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Funding

This study was supported by the National Key R&D Program of China (Grant No.: 2017YFB0503300).

Author information

Authors and Affiliations

  1. Beijing Institute of Control Engineering, Beijing, 100190, China

    Fuchang Zuo, Liansheng Li, Zhiwu Mei, Loulou Deng, Yueming Li, Yongqiang Shi & Jianwu Chen

  2. College of Intelligence Science, National University of Defense Technology, Changsha, 410073, China

    Hao Hu

  3. Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian, 116024, China

    Renke Kang

  4. Beijing Institute of Spacecraft System Engineering, Beijing, 100194, China

    Jun Xie

Authors
  1. Fuchang Zuo
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  2. Liansheng Li
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  3. Zhiwu Mei
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  4. Hao Hu
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  5. Loulou Deng
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  6. Yueming Li
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Contributions

Zhiwu Mei, Renke Kang, and Jun Xie contributed to the conception of the study; Hao Hu, Loulou Deng, and Yueming Li designed the polishing setup and performed the polishing experiment; Fuchang Zuo and Liansheng Li contributed significantly to modeling, simulation, and manuscript preparation; Fuchang Zuo and Yueming Li performed the roughness measurement and analysis of the polishing mandrel and wrote the manuscript; Yongqiang Shi and Jianwu Chen helped perform the analysis with constructive discussions.

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Correspondence to Fuchang Zuo.

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Zuo, F., Li, L., Mei, Z. et al. Precision polishing of the mandrel for X-ray grazing incidence mirrors. Int J Adv Manuf Technol 118, 43–53 (2022). https://doi.org/10.1007/s00170-021-07185-1

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