Skip to main content
SpringerLink
Log in

‘Spin-on glass’ films for semiconductor technology

Des films SOG pour la technologie des semi-conducteurs

“Aufgesponnene Glastilme” für die Halbleiterindustrie

  • Papers
  • Published:
Surface Coatings International Part B: Coatings Transactions

Summaries

‘Spin-on glass’ films prepared by the sol-gel method from hybrid silicon-organic sol-gel systems doped by inorganic additives may be used as catalyst layers for semiconductor and optic sensors. Such coatings are extremely versatile due to the simplicity and flexibility of the technology process used in their preparation and its effective influence on gas sensor parameters.

However, systematic information concerning the synthesis and features of depositions of ‘spin-on glass’ films is not enough.

This paper is based on the author’s long experience in preparing and using ‘spin-on glass’ films in a cycle of manufacturing semiconductor devices, including sensors. The influence of the nature and concentration of inorganic dopants as well as organic and high molecular additives on film properties are discussed.

Résumé

Des films SOG préparés selon la méthode sol-gel à partir des systèmes sol-gel hybrides organo-silicium dopés d’additifs inorganiques peuvent être utilisés comme couches catalyseurs pour capteurs optiques et de type semi-conducteur. De tels revêtements sont très polyvalents grace à la simplicité et à la flexibilité du procédé technologique utilisé dans leur préparation et à l’influence efficace de celui-ci sur les paramètres de capteurs gazeux.

Cependant, un renseignement systémique concernant la synthèse et les caractéristiques des dépositions des films SOG n’est pas adéquat.

Cet article est basé sur la longue expérience de l’auteur de la préparation et de l’emploi des films SOG au cours d’un cycle de fabrication d’ appareils semi-conducteurs y compris capteurs. L’influence de la nature et de la concentration des dopants inorganiques et des additifs organiques à haut taux moléculaire sur les propriétés des films est discutée.

Zusammenfassung

Aufgesponnene Glasfilme, die mittels der Sol-Gel Methode aus hybridisierten Silizium-Organischen Sol-Gel Systemen, versetzt mit anorganischen Additiven, hergestellt wurden, können als Katalysatorenschichten für Halbleiter und optische Sensoren verwendet werden. Solche Beschichtungen sind extrem vielseitig, weil die Herstellungstechnologie sowohl einfach als auch flexibel ist, insbesondere durch ihren Einfluss auf Gassensorparameter.

Es ist allerdings nicht genug, nur systemische Informationen über die Synthese und die Eigenschaften des aufgesponnenen Glasfilmes zu erhalten.

Der Autor dieser Arbeit hat langjährige Erfahrun in der Herstellung und Anwendung von aufgesponnenen Glasfilmen in der Herstellung von Halbleitern z. B. in Sensoren. Er erläutert den Einfluss sowohl der Art als auch der Konzentration der anorganischen Additive, und ebenfalls die Auswirkung von hoch-molekularen Additiven auf die Filmeigenschaften.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Grebenschikov I V, A G Vlasov, B S Neporent and N V Sueikovskaya,Blooming of Optics, (in Russian), Gostekhizdat, Moscow, 1946

    Google Scholar 

  2. Sueikovskaya N V,Chemical Methods of Preparing Thin Transparency Films, (in Russian), Khimiya, Leningrad, 1971

    Google Scholar 

  3. Shcreder X, ‘Deposition of oxide layers from organic solutions’,Physics of Thin Films,5, 84–139, (in Russian), Mir, Moscow 1972

    Google Scholar 

  4. Borisenko A I, V V Novikov, N E Prikhidko, I M Mitnikova and L Ph Chepik,Thin Inorganic Films in Microelectronics, (in Russian), Nauka, Leningrad, 1972

    Google Scholar 

  5. Brinker C J and G W Scherer, ‘Solgel science’,The Physics and Chemistry of Sol-Gel Processing, Academic Press, San Diego, 1990

    Google Scholar 

  6. Chen D, ‘Anti-reflection (AR) coatings made by sol-gel processes: A review’,Solar Energy Materials & Solar Cells,68, 313–36, 2001

    Article  CAS  Google Scholar 

  7. Martucci A, N Bassiri, M Guglielmi, L Armelao, S Gross and J C Pivin, ‘NiO SiO2 sol-gel nanocomposite films for optical gas sensor’,Sol-Gel Sci Tech,26, (1–3), 993–6, 2003

    Article  CAS  Google Scholar 

  8. Phani A R and S Santucci, ‘Structural characterization of iron titanium oxide synthesized by solgel spin-coating technique’,Materials Letters,50, 240–5, September 2001

    Article  CAS  Google Scholar 

  9. Shilova O A, L Ph Chepik and Yu Z Bubnov, ‘Properties of the films obtained from solutions on the basis of tetraethoxysilane on technological aspects of their formation’,Journal of Applied Chemistry, (in Russian),68, (10), 1608–12, Russian Academy of Science, 1995

    CAS  Google Scholar 

  10. Shilova O A, Yu Z Bubnov and S V Hashkovsky, ‘Application and prospects of use of thin glass-like films’,Questions of Chemistry and Chemical Technology, (in Russian),1, 75–80, Ukrainian State Chemical Technological University, Dnepropetrovsk, 2001

    Google Scholar 

  11. Shilova O A and S V Hashkovsky, ‘The sol-gel method of preparation of composition glassy and glass-ceramic films on the basis of inorganic polymers’,Materials, Technologies, Instruments, (in Russian),6, (2), 64, National Academy of Science of Belarus, 2001

    Google Scholar 

  12. Iler R K,The Chemistry of Silica, Solubility, Polymerization, Colloid and Surface Properties and Biochemistry of Silica, (in Russian),1 and 2, Mir, Moscow, 1982

    Google Scholar 

  13. Voznyakovskaya (Shilova) O A, L Ph Chepik, I M Mitnikova and L I Pyanova, ‘Research of influence of structure of the films containing boron on process of boron diffusion in silicon’,Questions of Radio Electronics, Technology, Manufacture, Equipment, (in Russian),3, 114–7, Ministry of Radio Industry of the USSR, 1984

    Google Scholar 

  14. Bubnov Yu Z, L Ph Chepik and O A Shilova, ‘Surface condition of the films containing boron and obtained from tetraethoxysilane-derived solutions’, Proceedings of XII Meeting on Temperature-stable Functional Coatings,2, 94–7, (in Russian), Institute of Silicate Chemistry of Russian Academy of Sciences, St Petersburg, 1997

    Google Scholar 

  15. Sergeev G B, ‘Nanochemistry of metals’,Progress of Chemistry, (in Russian),70, (10), 915–33, Russian Academy of Science, 2001

    Google Scholar 

  16. Heinrichs B, F Noville and J-P Pirard, ‘Pd/SiO2-cogelled aerogel catalysts and impregnated aerogel and xerogel catalysts: Synthesis and characterization’,Journal of Catalysis,170, 366–76, 1997

    Article  CAS  Google Scholar 

  17. Voznyakovskaya (Shilova) O A, I M Mitnikova, L I Khaeirusova, L I Pyanova, A S Yakovlev, ‘About a choice of heat treatment conditions during research of protective glassy films structure and composition’,Questions of Radio Electronics, Technology, Manufacture, Equipment, (in Russian),2, 15–22, Ministry of Radio Industry of the USSR, 1982

    Google Scholar 

  18. Saltykov S A,Stereometrical Metallography, (in Russian), Nauka, Moscow, 1976

    Google Scholar 

  19. Matsuda A, Y Matsuno, M Tatsumisago, and T Minami, ‘Fine pattering and characterization of gel films derived from methyl triethoxysilane and tetraethoxysilane’,J Am Ceram Soc,81, (11), 2849–52, 1998

    Article  CAS  Google Scholar 

  20. Parkhill R L, E T Knobbe and M S Donley, ‘Application and evaluation of environmentally compliant spray-coated ormosil films as corrosion resistant treatments for aluminum 2024-T3’,Progress in Organic Coatings,41, 261–5, 2001

    Article  CAS  Google Scholar 

  21. Kotani Y, A Matsuda, T Kogure, M Tatsumisago and T Minam, ‘Effects of addition of poly(ethylene glycol) on the formation of anatase nanocrystals in SiO2-TiO2 gel films with hot water treatment’,Chemistry of Materials,13, (6), 2144–9, 2001

    Article  CAS  Google Scholar 

  22. Shilova O A, S V Hashkovsky, E V Tarasyuk, V V Shilov, V V Shevchenko, Yu P Gomza and N S Klimenko, ‘Organic-inorganic insulating coatings based on sol-gel technology’,J Sol-Gel Sci Tech,26 (1–3), 1131–5, 2003

    Article  CAS  Google Scholar 

  23. Adeogun M J, G M Gray and J N Hay, ‘Nanoporous silicas from organic-inorganic hybrids’, Abstracts, 63–64, 11th International Workshop on Glasses, Ceramics, Hybrids and Nanocomposites from Gels, Abano-Termo, University of Padova, Padova, Italy, 16th to 21st September 2001

Download references

Author information

Authors and Affiliations

  1. The Laboratory of Analytical and Inorganic Chemistry, Institute of Silicate Chemistry of Russian Academy of Sciences, Odoevskogo St, 24/2, 199155, St Petersburg, Russia

    OA Shilova

Authors
  1. OA Shilova
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to OA Shilova.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Shilova, O. ‘Spin-on glass’ films for semiconductor technology. Surface Coatings International Part B: Coatings Transactions 86, 195–202 (2003). https://doi.org/10.1007/BF02699653

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF02699653

Keywords

Search

Navigation