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Handbook of Sol-Gel Science and Technology pp 1–55Cite as

Hybrid Materials for Micro- and Nanofabrication

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Abstract

Hybrid organic–inorganic (HOI) sol–gel materials are becoming increasingly important as functional systems alternative to traditional organic resists for micro- and nanofabrication. Combining the processability of polymeric resists, with glass-like surface chemistry and enhanced mechanical/thermal stability, the direct use of hybrids as final micro-/nanostructured device materials is possible. Provided a specific engineering in material formulation, hybrid sol–gels can proficiently interact with radiation or undergo modifications under given thermal and pressure conditions. In this chapter, in addition to possible strategies to engineer hybrid sol–gel resists, an extensive presentation of developed material compositions and relative properties (mainly organic, inorganic, mesoporous) will be provided. Significant applications to traditional and next-generation lithography techniques will be shown, on the basis of recent reports from the scientific literature. Finally, few distinctive examples of devices realized through a synergistic engineering of hybrid materials and lithographic processes will be provided.

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Authors and Affiliations

  1. Department of Industrial Engineering, University of Padova, Via Marzolo 9, 35131, Padova, Italy

    Laura Brigo, Gioia Della Giustina & Giovanna Brusatin

  2. Center for Materials and Microsystems, Bruno Kessler Foundation, Via Sommarive 18, 38123, Trento, Italy

    Laura Brigo

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  1. Laura Brigo
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  2. Gioia Della Giustina
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  1. Rutgers University, Piscataway, New Jersey, USA

    Lisa Klein

  2. Madrid, Spain

    Mario Aparicio

  3. City University of New York, New York, USA

    Andrei Jitianu

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Brigo, L., Della Giustina, G., Brusatin, G. (2016). Hybrid Materials for Micro- and Nanofabrication. In: Klein, L., Aparicio, M., Jitianu, A. (eds) Handbook of Sol-Gel Science and Technology. Springer, Cham. https://doi.org/10.1007/978-3-319-19454-7_110-1

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  • DOI: https://doi.org/10.1007/978-3-319-19454-7_110-1

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  • Publisher Name: Springer, Cham

  • Online ISBN: 978-3-319-19454-7

  • eBook Packages: Springer Reference Chemistry and Mat. ScienceReference Module Physical and Materials ScienceReference Module Chemistry, Materials and Physics

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