Abstract
In this study, Alvarez metalenses, which is advantageous for miniaturization, with a compound-eye arrangement are designed, fabricated, and characterized. We designed three different lenses with different focal length designs, one of which varies focal length from 0.75 mm to 3.75 mm with substrate displacements from 10 μm to 50 μm. The compound-eye lens consists of a 4 × 4 array of 0.5 mm square lenses with a height of 400 nm, which is thinner compared to the conventional refractive micro-lens array (several dozen micrometers height). Alvarez metalenses were developed using the dielectric metasurface consisting of amorphous silicon nanopillars. Pillars were fabricated by electron beam lithography and reactive ion etching. Observation of the fabricated lens structure showed that the nanopillars of specific dimensions were missing. However, the image was obtained with the lenses we fabricated. The resolution obtained from the smallest identifiable pattern in the captured image was 6.35 lp/mm. Focal length measurements confirmed that the measured values agree well with the theoretical values.
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Acknowledgement
This work was supported in part by the Japan Society for the Promotion of Science (JSPS) KAKENHI under Grant 21H01781 and Grant 22K04894; in pard by “Advanced Research Infrastructure for Materials and Nanotechnology in Japan (ARIM)” of the Ministry of Education, Culture, Sports, Science and Technorogy (MEXT), Grant Number JPMXP1222UT1056. The authors would like to thank Prof. Y. Mita, Dr. A. Higo, Dr. E. Lebrasseur, and Mr. M. Fujiwara (The University of Tokyo) for their support during sample fabrication, also would like to thank Prof. Lucas Heitzmann Gabrielli (University of Campinas) for developing and maintaining gdstk, a Python library for creating and manipulating GDSII layout files, and also would like to thank a TSUBAME3.0 supercomputer at the Tokyo Institute of Technology for the numerical calculations.
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Adegawa, H., Aoki, K., Ikezawa, S., Iwami, K. (2023). Integrated Compound-Eye Alvarez Metalens Array for Apposition Image Acquisition. In: Suryadevara, N.K., George, B., Jayasundera, K.P., Mukhopadhyay, S.C. (eds) Sensing Technology. ICST 2022. Lecture Notes in Electrical Engineering, vol 1035. Springer, Cham. https://doi.org/10.1007/978-3-031-29871-4_18
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DOI: https://doi.org/10.1007/978-3-031-29871-4_18
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