Abstract
A polarization-separating metalens at the long-wavelength infrared was designed, developed, and demonstrated. The silicon quadrangular pillars are adopted as meta-atoms to achieve full 2π phase coverage at the design wavelength of 10.6 μm for both of two orthogonal linear polarizations with high transmittance. Their dimensions were determined by electromagnetic field analysis based on a finite element method, and transmittances of more than 70% were obtained in all meta-atoms. The metalens was fabricated through electron beam lithography and reactive ion etching, and SEM observation showed that the fabrication was done while maintaining good verticality. An imaging test was performed using a commercially available micro-bolometer, and it was confirmed that the light was focused at different positions for each linear polarization. In the case of 45°-polarized illumination, it was confirmed that the light was focused at both locations. The fabricated metalens successfully showed the ability of linear polarization separation of a thermal image.
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Acknowledgement
This work was supported in part by the Japan Society for the Promotion of Science (JSPS) KAKENHI under Grant 21H01781 and Grant 22K04894; in part by the Takeda Sentanchi Supercleanroom, University of Tokyo, through the “Nanotechnology Platform Program” of the Ministry of Education, Culture, Sports, Science, and Technology (MEXT), Japan, under Grant JPMXP 1222UT1041. The authors would like to thank Prof. Y. Mita, Dr. A. Higo, Dr. E. Lebrasseur, and Mr. M. Fujiwara (The University of Tokyo) for their support during sample fabrication, also would like to thank Prof. Lucas Heitzmann Gabrielli (University of Campinas) for developing and maintaining gdstk, a Python library for creating and manipulating GDSII layout files, and also would like to thank a TSUBAME3.0 supercomputer at the Tokyo Institute of Technology for the numerical calculations.
We have conducted various studies on dielectric metasurfaces and their optical characterization.
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Ishizuka, N., Li, J., Fuji, W., Ikezawa, S., Iwami, K. (2023). Fabrication of Linear Polarization-Separating Silicon Metalens at Long-Wavelength Infrared. In: Suryadevara, N.K., George, B., Jayasundera, K.P., Mukhopadhyay, S.C. (eds) Sensing Technology. ICST 2022. Lecture Notes in Electrical Engineering, vol 1035. Springer, Cham. https://doi.org/10.1007/978-3-031-29871-4_15
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DOI: https://doi.org/10.1007/978-3-031-29871-4_15
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