Abstract
The interaction of short, intense laser pulses with nanoparticles on a surface leads to laterally tightly confined, strongly enhanced electromagnetic fields below and around the nano-objects, which can easily give rise to nanoablation. This effect can be exploited for structuring substrate surfaces on a length scale well below the diffraction limit, one to two orders smaller than the incident laser wavelength. We report on structure formation by laser ablation in the optical near field of both dielectric and metallic nano-objects, the latter allowing even stronger and more localized enhancement of the electromagnetic field due to the excitation of plasmon modes. In the course of time, various improvements have been added to this technique, so that also more complex and even arbitrary structures can be produced by means of nanoablation. The near-field patterns generated on the surface can be read out with high-resolution techniques like scanning electron microscopy and atomic force microscopy and provide thus a valuable tool – in conjunction with numerical calculations like finite-difference time-domain (FDTD) simulations – for a deeper understanding of the optical and plasmonic properties of nanostructures and their applications.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
E. Synge, A suggested method for extending microscopic resolution into the ultra-microscopic region. Philos. Magazine Ser 7(6), 35, 356 (1928). https://doi.org/10.1080/14786440808564615
D. Pohl, Optical stethoscopy: Image recording with resolution λ/20. Appl. Phys. Lett. 44, 651 (1984). https://doi.org/10.1063/1.94865
R. Hillenbrand, F. Keilmann, P. Hanarp, D.S. Sutherland, J. Aizpurua, Coherent imaging of nanoscale plasmon patterns with a carbon nanotube optical probe. Appl. Phys. Lett. 83, 368 (2003). https://doi.org/10.1063/1.1592629
A.D. McFarland, M.A. Young, J.A. Dieringer, R.P. Van Duyne, Wavelength-scanned surface-enhanced Raman excitation spectroscopy. J. Phys. Chem. B 109, 11279 (2005). https://doi.org/10.1021/jp050508u
S. Nie, S.R. Emory, Probing single molecules and single nanoparticles by surface-enhanced Raman scattering. Science 275, 1102 (1997). https://doi.org/10.1126/science.275.5303.1102
J.N. Farahani, D.W. Pohl, H.-J. Eisler, B. Hecht, Single quantum dot coupled to a scanning optical antenna: A tunable superemitter. Phys. Rev. Lett. 95, 017402 (2005). https://doi.org/10.1103/PhysRevLett.95.017402
T. Hanke, G. Krauss, D. Traeutlein, B. Wild, R. Bratschitsch, A. Leitenstorfer, Efficient nonlinear light emission of single gold optical antennas driven by few-cycle near-infrared pulses. Phys. Rev. Lett. 103, 257404 (2009). https://doi.org/10.1103/PhysRevLett.103.257404
T. Hanke, J. Cesar, V. Knittel, A. Trügler, U. Hohenester, A. Leitenstorfer, R. Bratschitsch, Tailoring spatiotemporal light confinement in single plasmonic nanoantennas. Nano Lett. 12, 992 (2012). https://doi.org/10.1021/nl2041047
J.A. Schuller, E.S. Barnard, W. Cai, Y.C. Jun, J.S. White, M.L. Brongersma, Plasmonics for extreme light concentration and manipulation. Nat. Mater. 9, 193 (2010). https://doi.org/10.1038/nmat2630
J. Jersch, K. Dickmann, Nanostructure fabrication using laser field enhancement in the near field of a scanning tunneling microscope tip. Appl. Phys. Lett. 68, 868 (1996). https://doi.org/10.1063/1.116527
J. Boneberg, M. Tresp, M. Ochmann, H.-J. Münzer, P. Leiderer, Time resolved measurements of the response of a STM tip upon illumination with a nanosecond laser pulse. Appl. Phys. A Mater. Sci. Process. 66, 615–619 (1998a). https://doi.org/10.1007/s003390050722
J. Boneberg, H.-J. Münzer, M. Tresp, M. Ochmann, P. Leiderer, The mechanism of nanostructuring upon nanosecond laser irradiation of a STM tip. Appl. Phys. A Mater. Sci. Process. 67, 381 (1998b). https://doi.org/10.1007/s003390050789
R. Huber, M. Koch, J. Feldmann, Laser-induced thermal expansion of a scanning tunneling microscope tip measured with an atomic force microscope cantilever. Appl. Phys. Lett. 73, 2521 (1998). https://doi.org/10.1063/1.122502
A. Chimmalgi, T.Y. Choi, C.P. Grigoropoulos, K. Komvopoulos, Femtosecond laser aperturless near-field nanomachining of metals assisted by scanning probe microscopy. Appl. Phys. Lett. 82, 1146 (2003). https://doi.org/10.1063/1.1555693
A. Chimmalgi, C. Grigoropoulos, K. Komvopoulos, Surface nanostructuring by nano−/femtosecond laser-assisted scanning force microscopy. J. Appl. Phys. 97, 104319 (2005). https://doi.org/10.1063/1.1899245
S.M. Huang, M.H. Hong, Y.F. Lu, B.S. Luk’yanchuk, W.D. Song, T.C. Chong, Pulsed-laser assisted nanopatterning of metallic layers combined with atomic force microscopy. J. Appl. Phys. 91, 3268 (2002b). https://doi.org/10.1063/1.1448882
Y.F. Lu, Z.H. Mai, Y.W. Zheng, W.D. Song, W.K. Chim, Nanostructure fabrication using pulsed lasers in combination with a scanning tunneling microscope: Mechanism investigation. Appl. Phys. Lett. 76, 1200 (2000b). https://doi.org/10.1063/1.125982
Z.H. Mai, Y.F. Lu, S.M. Huang, W.K. Chim, Mechanism of laser-induced nano modification on hydrogen-passivated Si(100) surfaces underneath the tip of an scanning tunneling microscope. J. Vac. Sci. Technol. B18, 1853 (2000). https://doi.org/10.1116/1.1303815
K. Imen, S.J. Lee, S.D. Allen, Laser-assisted micron scale particle removal. Appl. Phys. Lett. 58, 203 (1991). https://doi.org/10.1063/1.104923
A.C. Tam, W.P. Leung, W. Zapka, W. Ziemlich, Laser-cleaning techniques for removal of surface particulates. J. Appl. Phys. 71, 3515 (1992). https://doi.org/10.1063/1.350906
P. Leiderer, J. Boneberg, V. Dobler, M. Mosbacher, H.-J. Münzer, N. Chaoui, J. Siegel, J. Solis, C.N. Afonso, T. Fourrier, G. Schrems, D. Bäuerle, Laser-induced particle removal from Silicon wafers, in High Power Laser Ablation III, April 24–28, 2000, C.R. Phipps ed., Proc. SPIE4065, 249, (2000). https://doi.org/10.1117/12.407353
G. Mie, Articles on the optical characteristics of turbid tubes, especially colloidal metal solutions. Ann. Phys. 25, 377 (1908). https://doi.org/10.1002/andp.19083300302
P.W. Barber, S.C. Hill, Light Scattering by Particles: Computational Methods (World Scientific, 1990). https://doi.org/10.1142/0784
H.M. Nussenzveig, W.J. Wiscombe, Efficiency factors in Mie scattering. Phys. Rev. Lett. 45, 1490 (1980). https://doi.org/10.1103/PhysRevLett.45.1490
L. Bergmann and C. Schäfer, Lehrbuch der Experimentalphysik: Bd. III Optik (Walter de Gruyter, 1987)
B.S. Luk’yanchuk, M. Mosbacher, Y.W. Zheng, H.-J. Münzer, S.M. Huang, M. Bertsch, W.D. Song, Z.B. Wang, Y.F. Lu, O. Dubbers, J. Boneberg, P. Leiderer, M.H. Hong, T.C. Chong, Optical resonance and near-field effects in dry laser cleaning, in Laser Cleaning, ed. by B. Lukyanchuk, (World Scientific, 2002), p. 106
Y.F. Lu, L. Zhang, W.D. Song, Y.W. Zheng, B.S. Luk’yanchuk, Laser writing of a subwavelength structure on silicon (100) surfaces with particle-enhanced optical irradiation. JETP Lett. 72, 457 (2000a). https://doi.org/10.1134/1.1339899
Z. Chen, A. Taflove, V. Backman, Photonic nanojet enhancement of backscattering of light by nanoparticles: A potential novel visible-light ultramicroscopy technique. Opt. Express 12, 1214 (2004). https://doi.org/10.1364/OPEX.12.001214
B.S. Luk’yanchuk, R. Paniagua-Domínguez, I. Minin, O. Minin, Z. Wang, Refractive index less than two: Photonic nanojets yesterday, today and tomorrow. Opt. Mater. Express 7, 1820 (2017). https://doi.org/10.1364/OME.7.001820
S. Surdo, M. Duocastella, A. Diaspro, Nanopatterning with photonic Nanojets: Review and perspectives in biomedical research. Micromachines 12, 256 (2021). https://doi.org/10.3390/mi12030256
M. Terakawa, N.N. Nedyalkov, Near-field optics for nanoprocessing. Adv. Opt. Technol. 5, 17 (2016). https://doi.org/10.1515/aot-2015-0054
H.-J. Münzer, Laserinduzierte Nanostrukturierung von Oberflächen, PhD dissertation, (Konstanz 2001)
C. Hafner, The Generalized Multipole Technique for Computational Electromagnetics (Artech House, Inc., 1990)
H.-J. Münzer, M. Mosbacher, M. Bertsch, O. Dubbers, F. Burmeister, A. Pack, R. Wannemacher, B. U. Runge, D. Bäuerle, J. Boneberg and P. Leiderer, Optical near-field effects in surface nanostructuring and laser cleaning , Proc. SPIE 4426, 180 (2002)
M. Mosbacher, H.-J. Münzer, J. Zimmermann, J. Solis, J. Boneberg, P. Leiderer, Optical field enhancement effects in laser-assisted particle removal. Appl. Phys. A Mater. Sci. Process. 72, 41 (2001). https://doi.org/10.1007/s003390000715
A. Plech, P. Leiderer, J. Boneberg, Femtosecond laser near field ablation. Laser Photon. Rev. 3, 435–451 (2009). https://doi.org/10.1002/lpor.200810044
R. Denk, K. Piglmayer, D. Bäuerle, Laser-induced nanopatterning of PET using a-SiO2 microspheres. Appl. Phys. A Mater. Sci. Process. 74, 825 (2002). https://doi.org/10.1007/s003390201295
H.-J. Münzer, M. Mosbacher, M. Bertsch, J. Zimmermann, P. Leiderer, J. Boneberg, Local field enhancement effects for nanostructuring of surfaces. J. Microsc. 202, 129 (2001). https://doi.org/10.1046/j.1365-2818.2001.00876.x
Z.B. Wang, M.H. Hong, B.S. Luk'yanchuk, Y. Lin, Q.F. Wang, T.C. Chong, Angle effect in laser nanopatterning with particle-mask. J. Appl. Phys. 96, 6845 (2004). https://doi.org/10.1063/1.1786652
P. Kühler, D. Puerto, M. Mosbacher, P. Leiderer, F.J. Garcia de Abajo, J. Siegel, J. Solis, Femtosecond-resolved ablation dynamics of Si in the near field of a small dielectric particle. Beilstein J. Nanotechnol. 4, 501 (2013). https://doi.org/10.3762/bjnano.4.59
S.M. Huang, Z. Sun, B.S. Luk’yanchuk, M.H. Hong, L.P. Shi, Nanobump arrays fabricated by laser irradiation of polystyrene particle layers on silicon. Appl. Phys. Lett. 86, 161911 (2005). https://doi.org/10.1063/1.1886896
F. Lang, M. Mosbacher, P. Leiderer, Near field induced defects and influence of the liquid layer thickness in Steam Laser Cleaning of silicon wafers. Appl. Phys. A Mater. Sci. Process. 77, 177 (2003). https://doi.org/10.1007/s00339-003-2101-0
M. Mosbacher, V. Dobler, M. Bertsch, H.-J. Münzer, J. Boneberg, P. Leiderer, Laser cleaning of silicon wafers: Prospects and problems, in Surface Contamination and Cleaning, ed. by K. L. Mittal, vol. 1, (2003), p. 311
X.C. Wang, H.Y. Zheng, C.W. Tan, F. Wang, H.Y. Yu, K.L. Pey, Fabrication of silicon nanobump arrays by near-field enhanced laser irradiation. Appl. Phys. Lett. 96, 084101 (2010). https://doi.org/10.1063/1.3327513
G. Wysocki, R. Denk, K. Piglmayer, N. Arnold, D. Bäuerle, Single-step fabrication of silicon-cone arrays. Appl. Phys. Lett. 82, 692 (2003). https://doi.org/10.1063/1.1538347
J. Bischof, D. Scherer, S. Herminghaus, P. Leiderer, Dewetting modes of thin metallic films: Nucleation of holes and spinodal dewetting. Phys. Rev. Lett. 77, 1536 (1996). https://doi.org/10.1103/PhysRevLett.77.1536
S.M. Huang, M.H. Hong, B.S. Luk’yanchuk, Y.W. Zheng, W.D. Song, Y.F. Lu, T.C. Chong, Pulsed laser-assisted surface structuring with optical near-field enhanced effects. J. Appl. Phys. 92, 2495 (2002a). https://doi.org/10.1063/1.1501768
F. Burmeister, C. Schäfle, B. Keilhofer, C. Bechinger, J. Boneberg, P. Leiderer, From mesoscopic to nanoscopic surface structures: lithography with colloid monolayers. Adv. Mater. 10, 495 (1998). https://doi.org/10.1002/(SICI)1521-4095(199804)10:6<495::AID-ADMA495>3.0.CO;2-A
H.W. Deckman, J.H. Dunsmuir, Natural lithography. Appl. Phys. Lett. 41, 377 (1982). https://doi.org/10.1063/1.93501
U.C. Fischer, H.P. Zingsheim, Submicroscopic pattern replication with visible light. J. Vac. Sci. Technol. 19, 881 (1981). https://doi.org/10.1116/1.571227
A. Kosiorek, W. Kandulski, P. Chudzinski, K. Kempa, M. Giersig, Shadow nanosphere lithography: Simulation and experiment. Nano Lett. 4, 1359 (2004). https://doi.org/10.1021/nl049361t
D. Brodoceanu, L. Landström, D. Bäuerle, Laser-induced nanopatterning of silicon with colloidal monolayers. Appl. Phys. A Mater. Sci. Process. 86, 313 (2007). https://doi.org/10.1007/s00339-006-3781-z
K.L.N. Deepak, D. Grojo, L. Charmasson, P. Delaporte, O. Utéza, M. Dussauze, E. Fargin, Fabrication of microcraters on silicon substrate by UV nanosecond phononic nanojets from microspheres. UVX 2012, 02003 (2013). https://doi.org/10.1051/uvx/201302003
S.M. Huang, Z. Sun, Y.F. Lu, Nanofabrication by laser irradiation of polystyrene particle layers on silicon. Nanotechnology 18, 025302 (2007). https://doi.org/10.1088/0957-4484/18/2/025302
Y. Lu, S.C. Chen, Nanopatterning of a silicon surface by near-field enhanced laser irradiation. Nanotechnology 14, 505 (2003). https://doi.org/10.1088/0957-4484/14/5/305
K. Piglmayer, R. Denk, D. Bäuerle, Laser-induced surface patterning by means of microspheres. Appl. Phys. Lett. 80, 4693 (2002). https://doi.org/10.1063/1.1489085
H. Takada, M. Obara, Fabrication of hexagonally arrayed nanoholes using femtosecond laser pulse ablation with template of subwavelength polystyrene particle array. Jap. J. Appl. Phys. 44, 7993 (2005). https://doi.org/10.1063/1.350906
M. Ulmeanu, M. Zamfirescu, L. Rusen, C. Luculescu, A. Moldovan, A. Stratan, R. Dabu, Structuring by field enhancement of glass, Ag, Au, and Co thin films using short pulse laser ablation. J. Appl. Phys. 106, 114908 (2009). https://doi.org/10.1063/1.3264833
O. Watanabe, T. Ikawa, M. Hasegawa, M. Tsuchimori, Y. Kawata, Nanofabrication induced by near-field exposure from a nanosecond laser pulse. Appl. Phys. Lett. 79, 1366 (2001). https://doi.org/10.1063/1.1398326
Y. Zhou, M.H. Hong, J.Y.H. Fuh, L. Lu, B.S. Luk’yanchuk, Z.B. Wang, L.P. Shi, T.C. Chong, Direct femtosecond laser nanopatterning of glass substrate by particle-assisted near-field enhancement. Appl. Phys. Lett. 88, 023110 (2006). https://doi.org/10.1063/1.2163988
S. Juodkazis, Y. Nishi, H. Misawa, V. Mizeikis, O. Schecker, R. Waitz, P. Leiderer, E. Scheer, Optical transmission and laser structuring of silicon membranes. Opt. Express 17, 15308 (2009). https://doi.org/10.1364/OE.17.015308
M. Ulmeanu, P. Petkov, D. Ursescu, V.A. Maraloiu, F. Jipa, E. Brousseau, M.N.R. Ashfold, Pattern formation on silicon by laser-initiated liquid-assisted colloidal lithography. Nanotechnology 26, 455303 (2015). https://doi.org/10.1088/0957-4484/26/45/455303
M. Ulmeanu, P. Petkov, D. Ursescu, F. Jipa, R. Harniman, E. Brousseau, M.N.R. Ashfold, Substrate surface patterning by optical near field modulation around colloidal particles immersed in a liquid. Opt. Express 24, 27340 (2016). https://doi.org/10.1364/OE.24.027340
W. Guo, Z.B. Wang, L. Li, D.J. Whitehead, B.S. Luk’yanchuk, Z. Liu, Near-field laser parallel nanofabrication of arbitrary-shaped patterns. Appl. Phys. Lett. 90, 243101 (2007). https://doi.org/10.1063/1.2748035
R. Fardel, E. McLeod, Y. Tsai, C.B. Arnold, Nanoscale ablation through optically trapped microspheres. Appl. Phys. A Mater. Sci. Process. 101, 41 (2010). https://doi.org/10.1007/s00339-010-5792-z
E. McLeod, C.B. Arnold, Subwavelength direct-write nanopatterning using optically trapped microspheres. Nat. Nanotechnol. 3, 413 (2008). https://doi.org/10.1038/nnano.2008.150
E. McLeod, C.B. Arnold, Array-based optical nanolithography using optically trapped microlenses. Opt. Express 17, 3640 (2009). https://doi.org/10.1364/OE.17.003640
E.M. Perassi, J.C. Hernandez-Garrido, M.S. Moreno, E.R. Encina, E.A. Coronado, P.A. Midgley, Using highly accurate 3D nanometrology to model the optical properties of highly irregular nanoparticles: A powerful tool for rational design of plasmonic devices. Nano Lett. 10, 2097–2104 (2010). https://doi.org/10.1021/nl1005492
K. Yee, Numerical solution of initial boundary value problems involving Maxwell's equations in isotropic media. IEEE Trans. Antennas Propag. 14, 302 (1966). https://doi.org/10.1109/TAP.1966.1138693
S. Dickreuter, J. Gleixner, A. Kolloch, J. Boneberg, E. Scheer, P. Leiderer, Mapping of plasmonic resonances in nanotriangles. Beilstein J. Nanotechnol. 4, 588 (2013). https://doi.org/10.3762/bjnano.4.66
A. Merlen, F. Lagugne-Labarthet, Imaging the optical near field in Plasmonic nanostructures. Appl. Spectr. 68, 1307 (2014). https://doi.org/10.1366/14-07699
P. Leiderer, C. Bartels, J. König-Birk, M. Mosbacher, J. Boneberg, Imaging optical near-fields of nanostructures. Appl. Phys. Lett. 85, 5370 (2004). https://doi.org/10.1063/1.1819990
W. Huang, W. Qian, M.A. El-Sayed, Gold nanoparticles propulsion from surface fueled by absorption of femtosecond laser pulse at their surface Plasmon resonance. J. Am. Chem. Soc. 128, 13330 (2006). https://doi.org/10.1021/ja064328p
A.A. Jamali, B. Witzigmann, R. Morarescu, T. Baumert, F. Träger, F. Hubenthal, Local near field assisted ablation of fused silica: An experimental and theoretical study. Appl. Phys. A Mater. Sci. Process. 110, 743 (2013). https://doi.org/10.1007/s00339-012-7135-8
T. Geldhauser, S. Ikegaya, A. Kolloch, N. Murazawa, K. Ueno, J. Boneberg, P. Leiderer, E. Scheer, H. Misawa, Visualization of near-field enhancements of gold triangles by nonlinear photopolymerization. Plasmonics 6, 207 (2011). https://doi.org/10.1007/s11468-010-9189-9
N. Murazawa, K. Ueno, V. Mizeikis, S. Juodkazis, H. Misawa, Spatially selective nonlinear Photopolymerization induced by the near-field of surface Plasmons localized on rectangular gold Nanorods. J. Phys. Chem. C 113, 1147 (2009). https://doi.org/10.1021/jp809623y
K. Ueno, S. Juodkazis, T. Shibuya, Y. Yokota, V. Mizeikis, K. Sasaki, H. Misawa, Nanoparticle plasmon-assisted two-photon polymerization induced by incoherent excitation source. J. Am. Chem. Soc. 130, 6928 (2008). https://doi.org/10.1021/ja801262r
C. Hubert, A. Rumyantseva, G. Lerondel, J. Grand, S. Kostcheev, L. Billot, A. Vial, R. Bachelot, P. Royer, S. Chang, S.K. Gray, G.P. Wiederrecht, G.C. Schatz, Near-field photochemical imaging of noble metal nanostructures. Nano Lett. 5, 615 (2005). https://doi.org/10.1021/nl047956i
P. Kühler, F.J. Garcia de Abajo, J. Solis, M. Mosbacher, P. Leiderer, C. Afonso, J. Siegel, Imprinting the optical near field of microstructures with nanometer resolution. Small 5, 1825 (2009). https://doi.org/10.1002/smll.200900393
P. Kühler, F.J. Garcia de Abajo, P. Leiprecht, A. Kolloch, J. Solis, P. Leiderer, J. Siegel, Quantitative imaging of optical near fields. Opt. Express 20, 22063 (2012). https://doi.org/10.1364/OE.20.022063
L.E. Hennemann, A. Kolloch, A. Kern, J. Mihaljevic, J. Boneberg, P. Leiderer, A. Meixner, D. Zhang, Assessing the plasmonics of gold nano-triangles with higher order laser modes. Beilstein J. Nanotechnol. 3, 674 (2012). https://doi.org/10.3762/bjnano.3.77
M. Aeschlimann, M. Bauer, D. Bayer, T. Brixner, F.J. de Abajo, W. Pfeiffer, M. Rohmer, C. Spindler, F. Steeb, Adaptive subwavelength control of nano-optical fields. Nature 446, 301 (2007). https://doi.org/10.1038/nature05595
C.M. Scheffler, R.C. Word, R. Könenkamp, Controlling electric field and photoemission at the tips of triangular gold antennas. Plasmonics 16, 371 (2021). https://doi.org/10.1007/s11468-020-01292-7
Q. Sun, K. Ueno, H. Yu, A. Kubo, Y. Matsuo, H. Misawa, Direct imaging of the near field and dynamics of surface plasmon resonance on gold nanostructures using photoemission electron microscopy. Light: Sci. Appl 2, e118 (2013). https://doi.org/10.1038/lsa.2013.74
J. Fiutowski, C. Maibohm, J. Kjelstrup-Hansen, H.-G. Rubahn, Laser ablation of polymer coatings allows for electromagnetic field enhancement mapping around nanostructures. Appl. Phys. Lett. 98, 193117 (2011). https://doi.org/10.1063/1.3591972
J. Boneberg, J. König-Birk, H.-J. Münzer, P. Leiderer, K. Shuford, G.C. Schatz, Optical near-fields of triangular nanostructures. Appl. Phys. A Mater. Sci. Process. 89, 299–303 (2007). https://doi.org/10.1007/s00339-007-4138-y
A. Kolloch, T. Geldhauser, K. Ueno, H. Misawa, J. Boneberg, A. Plech, P. Leiderer, Femtosecond and picosecond near-field ablation of gold nanotriangles: Nanostructuring and nanomelting. Appl. Phys. A Mater. Sci. Process. 104, 793–799 (2011). https://doi.org/10.1007/s00339-011-6443-8
D. Eversole, B. Luk’yanchuk, A. Ben-Yakar, Plasmonic laser nanoablation of silicon by the scattering of femtosecond pulses near gold nanospheres. Appl. Phys. A Mater. Sci. Process. 89, 283–291 (2007). https://doi.org/10.1007/s00339-007-4166-7
N.N. Nedyalkov, H. Takada, M. Obara, Nanostructuring of silicon surface by femtosecond laser pulse mediated with enhanced near-field of gold nanoparticles. Appl. Phys. A Mater. Sci. Process. 85, 163 (2006a). https://doi.org/10.1007/s00339-006-3679-9
B.J. Nagy, Z. Pápa, L. Péter, C. Prietl, J.R. Krenn, P. Dombi, Near-field-induced femtosecond breakdown of Plasmonic nanoparticles. Plasmonics 15, 335 (2020). https://doi.org/10.1007/s11468-019-01043-3
R. Morarescu, L. Englert, B. Kolaric, P. Damman, R.A.L. Vallée, T. Baumert, F. Hubenthal, F. Träger, Tuning nanopatterns on fused silica substrates: A theoretical and experimental approach. J. Mater. Chem. 21, 4076 (2011). https://doi.org/10.1039/c0jm03829f
F. Hubenthal, R. Morarescu, L. Englert, L. Haag, T. Baumert, F. Träger, Parallel generation of nanochannels in fused silica with a single femtosecond laser pulse: Exploiting the optical near fields of triangular nanoparticles. Appl. Phys. Lett. 95, 063101 (2009). https://doi.org/10.1063/1.3186787
E. Boulais, A. Robitaille, P. Desjeans-Gauthier, M. Meunier, Role of near-field enhancement in plasmonic laser nanoablation using gold nanorods on a silicon substrate: Comment. Opt. Express 19, 6177–6178 (2011). https://doi.org/10.1364/OE.19.006177
R.K. Harrison, A. Ben-Yakar, Role of near-field enhancement in plasmonic laser nanoablation using gold nanorods on a silicon substrate. Opt. Express 18, 22556 (2010). https://doi.org/10.1364/OE.18.022556
R.K. Harrison, A. Ben-Yakar, Role of near-field enhancement in plasmonic laser nanoablation using gold nanorods on a silicon substrate: Reply. Opt. Express 19, 6179 (2011). https://doi.org/10.1364/OE.19.006179
S. Hashimoto, T. Uwada, M. Hagiri, H. Takai, T. Ueki, Gold nanoparticle-assisted laser surface modification of borosilicate glass substrates. J. Phys. Chem. C 113, 20640 (2009). https://doi.org/10.1021/jp905291h
S. Hashimoto, T. Uwada, M. Hagiri, R. Shiraishi, Mechanistic aspect of surface modification on glass substrates assisted by single shot pulsed laser-induced fragmentation of gold nanoparticles. J. Phys. Chem. C 115, 12, 4986 (2011). https://doi.org/10.1021/jp106830x
S. Imamova, N. Nedyalkov, A. Dikovska, P. Atanasov, M. Sawczak, R. Jendrzejeski, G. Sliwinski, M. Obara, Near field properties of nanoparticle arrays fabricated by laser annealing of thin Au and Ag films. Appl. Surf. Sci. 257, 1075 (2010). https://doi.org/10.1016/j.apsusc.2010.08.016
N. Nedyalkov, T. Sakai, T. Miyanishi, M. Obara, Near field properties in the vicinity of gold nanoparticles placed on various substrates for precise nanostructuring. J. Phys. D. Appl. Phys. 39, 5037 (2006b). https://doi.org/10.1088/0022-3727/39/23/021
N. Nedyalkov, T. Sakai, T. Miyanishi, M. Obara, Near field distribution in two dimensionally arrayed gold nanoparticles on platinum substrate. Appl. Phys. Lett. 90, 123106 (2007). https://doi.org/10.1063/1.2715103
A. Robitaille, É. Boulais, M. Meunier, Mechanisms of plasmon-enhanced femtosecond laser nanoablation of silicon. Opt. Express 21, 9703 (2013). https://doi.org/10.1364/OE.21.009703
J. Bonse, S. Baudach, J. Krüger, W. Kautek, M. Lenzner, Femtosecond laser ablation of silicon—Modification thresholds and morphology. Appl. Phys. A Mater. Sci. Process. 74, 19–25 (2002). https://doi.org/10.1007/s003390100893
D. von der Linde, K. Sokolowski-Tinten, J. Bialkowski, Laser-solid interaction in the femtosecond time regime. Appl. Surf. Sci. 109/110, 1 (1997). https://doi.org/10.1016/S0169-4332(96)00611-3
A. Kolloch, Plasmon resonances for Sub-100 nm silicon ablation: Quantitative measurement and nanometer-scale ablation mechanism, PhD Dissertation (Konstanz 2012) http://nbn-resolving.de/urn:nbn:de:bsz:352-231938
Acknowledgments
We appreciate numerous discussions with the groups of Carmen Afonso, Jan Siegel and Javier Solis (Madrid), Dieter Bäuerle (Linz) and Roland Oltra (Dijon), and also with Andrew C. Tam (San Jose), Minghui Hong, and Boris Luk’yanchuk (Singapore), Anton Plech (Karlsruhe), Andreas Pack and Reinhold Wannemacher (Chemnitz), and Hiroaki Misawa, Kosei Ueno, and Saulius Juodkazis (Sapporo) and their teams. In our group in Konstanz, we are in particular indebted to our master and PhD students Christof Bartels, Micha Bertsch, Simon Dickreuter, Julia Gleixner, Johannes Graf, Juliane König-Birk, Andreas Kolloch, Paul Kühler, Mario Mosbacher, Hajo Münzer, and Michael Ochmann.
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2023 The Author(s), under exclusive license to Springer Nature Switzerland AG
About this chapter
Cite this chapter
Boneberg, J., Scheer, E., Leiderer, P. (2023). Optical Nanostructuring by Near-Field Laser Ablation. In: Stoian, R., Bonse, J. (eds) Ultrafast Laser Nanostructuring. Springer Series in Optical Sciences, vol 239. Springer, Cham. https://doi.org/10.1007/978-3-031-14752-4_11
Download citation
DOI: https://doi.org/10.1007/978-3-031-14752-4_11
Published:
Publisher Name: Springer, Cham
Print ISBN: 978-3-031-14751-7
Online ISBN: 978-3-031-14752-4
eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)