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MOEMS-Enabled Miniaturized Biomedical Sensing and Imaging System

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Advanced MEMS/NEMS Fabrication and Sensors
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Abstract

Micro-system plays an important role in the miniaturization of the biomedical sensing and imaging instrumentation. The advanced sensors and actuators have already been widely applied to the biomedical devices for basic biological studies on preclinical small animal models and translational medicine on human patients in the clinics. Superior spatiotemporal resolution, broader field-of-view, and deeper penetration in the turbid tissue specimens have been achieved by the state-of-the-art fiber optics, opto-electronics, opto-mechanical packages and the micro-system development. In this chapter, representative micro-system enabled implantable, portable, and endoscopic system will be introduced.

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References

  • Arbabi, E., Li, J., Hutchins, R. J., Kamali, S. M., Arbabi, A., Horie, Y., Van Dorpe, P., Gradinaru, V., Wagenaar, D. A., & Faraon, A. (2018). Two-photon microscopy with a double-wavelength metasurface objective lens. Nano Letters, 18(8), 4943–4948.

    Article  Google Scholar 

  • Chen, S.-L., Xie, Z., Ling, T., Guo, L. J., Wei, X., & Wang, X. (2012). Miniaturized all-optical photoacoustic microscopy based on microelectromechanical systems mirror scanning. Optics Letters, 37(20), 4263–4265.

    Article  Google Scholar 

  • Chen, Q., Guo, H., Jin, T., Qi, W., Xie, H., & Xi, L. (2018). Ultracompact high-resolution photoacoustic microscopy. Optics Letters, 43(7), 1615–1618.

    Article  Google Scholar 

  • Chen, Q., Xie, H., & Xi, L. (2019). Wearable optical resolution photoacoustic microscopy. Journal of Biophotonics, 12(8), e201900066.

    Article  Google Scholar 

  • Choi, J., Qiu, Z., Rhee, C.-H., Wang, T., & Oldham, K. (2014). A three-degree-of-freedom thin-film PZT-actuated microactuator with large out-of-plane displacement. Journal of Micromechanics and Microengineering, 24(7), 075017.

    Article  Google Scholar 

  • Jung, I. W., López, D., Qiu, Z., & Piyawattanametha, W. (2018). 2-D MEMS scanner for handheld multispectral dual-axis confocal microscopes. Journal of Microelectromechanical Systems, 27(4), 605–612.

    Article  Google Scholar 

  • Li, H., Dong, B., Zhang, X., Shu, X., Chen, X., Hai, R., Czaplewski, D. A., Zhang, H. F., & Sun, C. (2019). Disposable ultrasound-sensing chronic cranial window by soft nanoimprinting lithography. Nature Communications, 10(1), 1–9.

    Article  Google Scholar 

  • Loewke, N. O., Qiu, Z., Mandella, M. J., Ertsey, R., Loewke, A., Gunaydin, L. A., Rosenthal, E. L., Contag, C. H., & Solgaard, O. (2019). Software-based phase control, video-rate imaging, and real-time Mosaicing with a Lissajous-scanned confocal microscope. IEEE Transactions on Medical Imaging, 39(4), 1127–1137.

    Article  Google Scholar 

  • Pahlevaninezhad, H., Khorasaninejad, M., Huang, Y.-W., Shi, Z., Hariri, L. P., Adams, D. C., Ding, V., Zhu, A., Qiu, C.-W., & Capasso, F. (2018). Nano-optic endoscope for high-resolution optical coherence tomography in vivo. Nature Photonics, 12(9), 540–547.

    Article  Google Scholar 

  • Park, H.-C., Zhang, X., Yuan, W., Zhou, L., Xie, H., & Li, X. (2019). Ultralow-voltage electrothermal MEMS based fiber-optic scanning probe for forward-viewing endoscopic OCT. Optics Letters, 44(9), 2232–2235.

    Article  Google Scholar 

  • Park, H.-C., Guan, H., Li, A., Yue, Y., Li, M.-J., Lu, H., & Li, X. (2020). High-speed fiber-optic scanning nonlinear endomicroscopy for imaging neuron dynamics in vivo. Optics Letters, 45(13), 3605–3608.

    Article  Google Scholar 

  • Piyawattanametha, W., Ra, H., Loewke, K. E., Mandella, M. J., Contag, C. H., Qiu, Z., Wang, T. D., Friedland, S., Liu, J. T., & Kino, G. S. (2012). In vivo near-infrared dual-axis confocal microendoscopy in the human lower gastrointestinal tract. Journal of Biomedical Optics, 17(2), 021102.

    Article  Google Scholar 

  • Qiu, Z., Pulskamp, J. S., Lin, X., Rhee, C.-H., Wang, T., Polcawich, R. G., & Oldham, K. (2010). Large displacement vertical translational actuator based on piezoelectric thin films. Journal of Micromechanics and Microengineering, 20(7), 075016.

    Article  Google Scholar 

  • Qiu, Z., Khondee, S., Duan, X., Li, H., Mandella, M. J., Joshi, B. P., Zhou, Q., Owens, S. R., Kurabayashi, K., & Oldham, K. R. (2014a). Vertical cross-sectional imaging of colonic dysplasia in vivo with multi-spectral dual axes confocal endomicroscopy. Gastroenterology, 146(3), 615–617.

    Article  Google Scholar 

  • Qiu, Z., Rhee, C.-H., Choi, J., Wang, T. D., & Oldham, K. R. (2014b). Large stroke vertical PZT microactuator with high-speed rotational scanning. Journal of Microelectromechanical Systems, 23(2), 256–258.

    Article  Google Scholar 

  • Sheng, Q., Li, B., Uddin, N., Mitul, A. F., Zhu, Y., Qiu, Z., & Han, M. (2020). High resolution, fast response fiber-optic temperature sensor with reduced end conduction effect. Optics Letters, 45(21), 6094–6097.

    Article  Google Scholar 

  • Tanguy, Q. A., Gaiffe, O., Passilly, N., Cote, J.-M., Cabodevila, G., Bargiel, S., Lutz, P., Xie, H., & Gorecki, C. (2020). Real-time Lissajous imaging with a low-voltage 2-axis MEMS scanner based on electrothermal actuation. Optics Express, 28(6), 8512–8527.

    Article  Google Scholar 

  • Yao, C.-Y., Li, B., & Qiu, Z. (2019a). 2D au-coated resonant MEMS scanner for NIR fluorescence intraoperative confocal microscope. Micromachines, 10(5), 295.

    Article  Google Scholar 

  • Yao, J., Peng, T., Sun, B., Zhang, H., Zhao, M., Dai, B., Liu, H., Ding, G., Sawada, R., & Yang, Z. (2019b). A single-fiber endoscope scanner probe utilizing two-degrees-of-freedom (2DOF) high-order resonance to realize larger scanning angle. IEEE Transactions on Components, Packaging and Manufacturing Technology, 9(12), 2332–2340.

    Article  Google Scholar 

  • Zong, W., Wu, R., Li, M., Hu, Y., Li, Y., Li, J., Rong, H., Wu, H., Xu, Y., & Lu, Y. (2017). Fast high-resolution miniature two-photon microscopy for brain imaging in freely behaving mice. Nature Methods, 14(7), 713–719.

    Article  Google Scholar 

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Correspondence to Zhen Qiu .

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Li, B., Huang, L., Qiu, Z. (2022). MOEMS-Enabled Miniaturized Biomedical Sensing and Imaging System. In: Yang, Z. (eds) Advanced MEMS/NEMS Fabrication and Sensors. Springer, Cham. https://doi.org/10.1007/978-3-030-79749-2_8

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  • DOI: https://doi.org/10.1007/978-3-030-79749-2_8

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  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-030-79748-5

  • Online ISBN: 978-3-030-79749-2

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