Abstract
Surface plasmon filters have a wide range of applications in nano-integrated optics because of simple structure and easy integration. Traditional noble metals used for surface plasmon filters are expensive. In this paper, we propose an infrared filter by using TiN. By adjusting the thickness of the metal replacement layer TiN and the photoresist waveguide layer, a pure 2 μm infrared filter is obtained. The full width at half maximum reaches 21.26 nm. Furthermore, the wavelength of peak of filter can be adjusted conveniently from 0.8 to 2.5 µm by modulating the period. Our study provides a theoretical basis for finding cheap alternatives to the materials used in plasma filters.
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Acknowledgements
Thanks for the support of National Key Research and Development Program (No. 2017YFB0403501), Zhejiang Provincial Natural Science Foundation (No. LQ15F040004), the Open Fund of the State Key Laboratory of Integrated Optoelectronics (No. IOSKL2015KF28), and the Talent Development Project in Photoelectric Detection of Top Priority Construction Subject of Instrument Science and Technology of Zhejiang Province (No. JL150540).
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Wang, L. et al. (2020). Tunable NIR Filter with High Q-Factor Realized by Using TiN as Plasmonic Layer. In: Peng, Y., Dong, X. (eds) Proceedings of 2018 International Conference on Optoelectronics and Measurement. Lecture Notes in Electrical Engineering, vol 567. Springer, Singapore. https://doi.org/10.1007/978-981-13-8595-7_12
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DOI: https://doi.org/10.1007/978-981-13-8595-7_12
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