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Carbon MEMS

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Authors and Affiliations

  1. Multiscale Manufacturing Laboratory, Department of Mechanical Engineering, Clemson University, 204 Fluor Daniel E1B, Clemson, SC, 29634, USA

    Rodrigo Martinez-Duarte, Monsur Islam & Rucha Natu

Authors
  1. Rodrigo Martinez-Duarte
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  2. Monsur Islam
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  3. Rucha Natu
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Corresponding author

Correspondence to Rodrigo Martinez-Duarte .

Editor information

Editors and Affiliations

  1. Biomimetics (NLB²), Ohio State University Nanoprobe Lab. for Bio- & Nanotechnology, Columbus, Ohio, USA

    Bharat Bhushan

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Martinez-Duarte, R., Islam, M., Natu, R. (2015). Carbon MEMS. In: Bhushan, B. (eds) Encyclopedia of Nanotechnology. Springer, Dordrecht. https://doi.org/10.1007/978-94-007-6178-0_101022-1

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  • DOI: https://doi.org/10.1007/978-94-007-6178-0_101022-1

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