Abstract
Although a scanning electron microscope (SEM) has very low tolerance to being disturbed by vibration, it requires a chiller for operation. Isolating the SEM from its associated chiller vibration takes careful consideration. This paper presents a case study of the performance of several slab-on-grade configurations. These configurations were specifically constructed to support various water chiller units and other service equipment as well as various vibration sensitive microscopes in a high performance research facility. In this study, the slabs are subjected to shaker-induced harmonic loading similar to that of a water chiller unit used to cool a SEM. The actual performance will be discussed in the context of generic design criteria for sensitive equipment and the SEM manufacturer-specified design criteria.
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Acknowledgements
The authors of this paper would like to thank PCB Piezotronics Inc. in particular Lou Zagst for providing the PCB 393B31 accelerometers used in this research as well as Drew McCrady of JEOL Ltd. for providing a brief vibration criteria history of JEOL’s equipment and the equivalent VC curve criteria for two electron microscopes.
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© 2015 The Society for Experimental Mechanics, Inc.
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Barben, B.R., Hanagan, L.M. (2015). Isolating a Scanning Electron Microscope from Chiller Unit Vibrations. In: Caicedo, J., Pakzad, S. (eds) Dynamics of Civil Structures, Volume 2. Conference Proceedings of the Society for Experimental Mechanics Series. Springer, Cham. https://doi.org/10.1007/978-3-319-15248-6_53
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DOI: https://doi.org/10.1007/978-3-319-15248-6_53
Publisher Name: Springer, Cham
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