Abstract
Some X-ray sources for laboratory near “water window” wavelengths have been developed. High reflective multilayer mirrors are required. In this wavelength region, Cr/Sc, Cr/Ti, Cr/V and Cr/C are promising for high reflective multilayer mirror. The layer thickness is typically about 1.0 nm. We have deposited Cr/C and Cr/Sc multilayers for λ=4.48 nm and reflectance of 15.2 % was obtained for Cr/C at near normal incidence. We also show that the interface of Cr/Ti multilayers can be significantly improved by inserting B4C as diffusion barrier layer. In this report, high-reflective multilayer mirrors with and without barrier layer were deposited by using magnetron sputtering method. The reflective properties of the multilayer mirror were measured by using synchrotron radiation.
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Acknowledgements
We are indebted to Dr. Franz Schäfers at BESSY-II, and Mingqi Cui at BSRF for their kindly help in synchrotron radiation measurements.
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Li, H., Zhu, J., Wang, Z. (2014). Development of High Reflective Multilayer Mirrors at “Water Window” Wavelengths in IPOE. In: Sebban, S., Gautier, J., Ros, D., Zeitoun, P. (eds) X-Ray Lasers 2012. Springer Proceedings in Physics, vol 147. Springer, Cham. https://doi.org/10.1007/978-3-319-00696-3_25
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DOI: https://doi.org/10.1007/978-3-319-00696-3_25
Publisher Name: Springer, Cham
Print ISBN: 978-3-319-00695-6
Online ISBN: 978-3-319-00696-3
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