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Particles in Gases and Liquids 2

Detection, Characterization, and Control

  • Book
  • © 1990

Overview

Editors:
  1. K. L. Mittal

    1. IBM U.S. Technical Education, Thornwood, USA

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Table of contents (31 chapters)

  1. Front Matter

    Pages i-ix
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  2. General Overview Papers

    1. Front Matter

      Pages 1-1
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    2. Modeling of Particle Deposition in Cleanroom Environments: Current Status

      • Jay R. Turner
      Pages 3-21

    3. Sampling of Airborne Particles for Contamination Assessment

      • Madhav B. Ranade, Y. C. Chang, J. W. Gentry
      Pages 23-31

    4. The Role of Bacterial Biofilms in Contamination of Process Fluids by Biological Particulates

      • Marc W. Mittelman, David C. White
      Pages 33-50

    5. Describing Filters and Filtration Processes Using the Concepts of Fractal Geometry

      • Brian H. Kaye
      Pages 51-59

    6. Detection and Control of Particles in Vacuum Environments for Semiconductor Processing

      • T. C. Smith
      Pages 61-74

    7. Operator-Generated Particles: Characterization, Monitoring and Control

      • Eric S. Burnett
      Pages 75-81

    8. Building and Using an Application-Specific Particle Atlas

      • Randy Greb, Michael Mckeag
      Pages 83-92

    9. Particulate Cleanliness Testing of Filters and Equipment in Process Fluids (Gas or Liquid)

      • Susan Goldsmith, George Grundelman, Mark Smith
      Pages 93-101

    10. Optical Particle Counter Performance Definitions Effects on Submicrometer Particle Measurement

      • A. Lieberman
      Pages 103-114

  3. Particle Generation and Deposition

    1. Front Matter

      Pages 115-115
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    2. Assessing Wiping Materials for their Potential to Contribute Particles to Clean Environments: A Novel Approach

      • Charles F. Mattina, Steven J. Paley
      Pages 117-128

    3. Robots as a Potential Source of Particulate Contamination

      • K. May, T. Pfeifer, R. J. Schilling
      Pages 129-141

    4. Particle Release from Surfaces by Mechanical Shocks

      • Hwa-Chi Wang, Horng-Yuan Wen, Gerhard Kasper
      Pages 143-154

    5. Flowrate Dependence of Particle Shedding from a Gas Delivery Line

      • Scott J. Alberhasky, Richard J. McCluskey, Denis J. Poley
      Pages 155-165

    6. Apparatus for Measuring Ultrafine Particle Emissions from Air Ionization Equipment

      • Michael Yost, Arnold Steinman, Al Lieberman
      Pages 167-178

    7. Measurement of Submicrometer Particle Deposition on Silicon Wafers in Cleanroom Environment

      • Ahmed A. Busnaina, Camilla M. Saviz
      Pages 179-194

  4. Particles in Gases: Detection, Characterization and Control

    1. Front Matter

      Pages 195-195
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    2. Characterization of Individual Particles in Gaseous Media by Mass Spectrometry

      • M. P. Sinha
      Pages 197-209
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Keywords

About this book

This book chronicles the proceedings of the Second Symposium on Particles in Gases and Liquids: Detection, Characterization and Control held as a part of the 20th Annual Fine Particle Society meeting in Boston, August 21-25, 1989. As this second symposium was as successful as the prior one, so we have decided to hold symposia on this topic on a regular (biennial) basis and the third symposium in this series is scheduled to be held at the 22nd Annual Meeting of the Fine Particle Society in San Jose, California, July 29-August 2, 1991. l As pointed out in the Preface to the prior volume in this series that recently there has been tremendous concern about yield losses due to unwanted particles, and these unwelcome particles can originate from a legion of sources, including process gases and liquids. Also all signals indicate that in the future manufacture of sophisticated and sensitive microelectronic components (with shrinking dimensions) and other precision parts, the need for detection, characterization, analysis and control of smaller and smaller particles will be more intensified.

Editors and Affiliations

  • IBM U.S. Technical Education, Thornwood, USA

    K. L. Mittal

Bibliographic Information

  • Book Title: Particles in Gases and Liquids 2

  • Book Subtitle: Detection, Characterization, and Control

  • Editors: K. L. Mittal

  • DOI: https://doi.org/10.1007/978-1-4899-3544-1

  • Publisher: Springer New York, NY

  • eBook Packages: Springer Book Archive

  • Copyright Information: Springer Science+Business Media New York 1990

  • Hardcover ISBN: 978-0-306-43809-7Published: 31 March 1991

  • Softcover ISBN: 978-1-4899-3546-5Published: 16 August 2013

  • eBook ISBN: 978-1-4899-3544-1Published: 11 November 2013

  • Edition Number: 1

  • Number of Pages: X, 408

  • Topics: Physical Chemistry

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