Skip to main content
SpringerLink
Log in
Book cover

Metallic Materials with High Structural Efficiency pp 101–112Cite as

Structure and Properties of Carbon Based Nanocomposite Films

  • Conference paper

Part of the book series: NATO Science Series II: Mathematics, Physics and Chemistry ((NAII,volume 146))

Abstract

DC co-sputtered Carbon-Nickel and Carbon-Nitride-Nickel thin films were investigated by transmission electron microscopy, XPS and nanoindentation to clarify the influence of Nitrogen and Ni additions on the structure formation and mechanical properties of the films. The films were deposited by magnetron sputtering in argon or nitrogen plasma at temperatures from 25 to 800°C onto NaCl and Si+SiO2 substrates. The microstructures of the films can be described as nanocomposites, built from Ni or Ni3C nanocrystals in a carbon/CNx matrix. The mechanical properties of the films were found to be dependent on the substrate temperature during deposition along with the changes of the structure. The highest nanohardness of 14 GPa was measured for the film grown at 200°C, while low values (2 GPa) were obtained for high temperature deposition. The change of the hardness is thought to be primarily the consequence of morphological and phase changes of the films in the temperature range 200-800°C.

This is a preview of subscription content, log in via an institution.

Chapter
USD   29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD   169.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD   219.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD   219.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Learn about institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. L. Hultman, J. Neidhardt, N. Hellgren, H. Sjöström, J.-E. Sundgren, MRS Bulletin March, 2003, 194.

    Google Scholar 

  2. X. Wang, P. J. Martin, Appl. Phys. Lett. 68, 1996, 1177.

    CAS  Google Scholar 

  3. K. Suenaga, M.P. Johansson, N. Hellgren, E. Broitman, L.R. Wallenberg, C. Colliex, J.-E. Sundgren, L. Hultman, hem. Phys. Lett. 300, 1999, 695.

    CAS  Google Scholar 

  4. S. Kumar, T.L. Tansley, J. Appl. Phys. 76, 1994, 4390.

    CAS  Google Scholar 

  5. D. Li, S. Lopez, Y.M. Chung, M.S. Wong, W.D. Sproul, J. Vac. Sci. Technol. A13, 1995, 1063.

    Google Scholar 

  6. Th. Malkow, I. Arce-Garcia, A. Kolitsch, D. Schneider, S. J. Bull, T.F. Page, Diamond Rel. Mater. 10, Issue 12, 2001, 2199.

    CAS  Google Scholar 

  7. Mingwu Bai, Koji Kato, Noritsugu Umehara, Yoshihiko Miyake, Thin Solid Films 377–378, 2000, 138.

    Google Scholar 

  8. E. Broitman, N. Hellgren, O. Wannstrand, M.P. Johansson, T. Berlind, H. Sjöström, J.-E. Sundgren, M. Larsson, L. Hultman, Wear 248, Issues 1–2, 2001, 55.

    Article  CAS  Google Scholar 

  9. Yuki Togashi, Yuko Hirohata, Tomoaki Hino, Vacuum 66, Issues 3–4, 2002, 391.

    Article  CAS  Google Scholar 

  10. A. Khursudov, K. Kato, S. Daisuke, J. Vac. Sci. Technol. A14, 1996, 235.

    Google Scholar 

  11. M.Y. Chen, X. Lin, V.P. Dravid, Y.W. Chung, N.S. Wong, W.D. Sproul, Surf. Coat. Techol. 54–55, 1992, 360.

    Google Scholar 

  12. B. F. Dorfman, Thin Solid Films 330, 1998, 76.

    Article  CAS  Google Scholar 

  13. Q.F. Huang, S.F. Yoon, Rusli, Q. Zhang, J. Ahn, E.J. Teo, T. Osipowicz, F. Watt, Diamond and Related Materials 11, 2002, 1031.

    CAS  Google Scholar 

  14. Xiang-Chen Sun, J.A. Toledo, Current Applied Physics 2, 2002, 113.

    Google Scholar 

  15. N. Laidani, L. Calliari, G. Speranza, V. Micheli, E. Galvanetto, Surf. Coat. Technol. 100–101, 2003, 116.

    Google Scholar 

  16. J.S. Chen, S.P. Lau, Z. Sun, G.Y. Chen, Y.J. Li, B.K. Tay, J.W. Chai, Thin Solid Films 398–399, 2001, 110.

    Google Scholar 

  17. Y. Kusano, I.M. Hutchings, Surf. Coat. Technol. 169–170, 2003, 739.

    Google Scholar 

  18. Gy. J. Kovács, G. Sáfrán, O. Geszti, T. Ujváry*, I. Bertóti*, G. Radnóczi, Surface and Coatings Technology, in press.

    Google Scholar 

  19. L. Kepinski, Carbon 30, Nr7, 1992, 949–955.

    CAS  Google Scholar 

  20. D. Bíró, A. Kovács, F. Misják, T. Szüts, P.B. Barna, Surface and Coatings Technology, in press.

    Google Scholar 

  21. J.P. Biersack, J.F. Ziegler, Transport of Ions in Matter, TRIM, Version 95.9, IBM Research: Yorktown Heights, NY 10598, USA, 1995.

    Google Scholar 

  22. S. Sinharoy, L.L. Levenson, Thin Solid Films 53, 1978, 31.

    Article  CAS  Google Scholar 

  23. J. Pugh, C. Lees, D. Bland, Nature 191, 1961, 865.

    Google Scholar 

  24. T. Ujvári, A. Kolitsch, A. Tóth, M. Mohai, I. Bertóti, Diamond Relat. Mater. 11, 2002, 1148.

    Google Scholar 

  25. T. Ujvári, B. Szikora, M. Mohai, A. Tóth, G. Keresztury, I. Bertóti, Diamond Relat. Mater. 11, 2002, 1199.

    Google Scholar 

  26. M. Kawamura, Y. Abe, K. Sasaki: Vacuum 59, 2000, 721.

    Article  CAS  Google Scholar 

  27. J. Neidhardt, Zs. Czigány, I.F. Brunnel, L. Hultman, J. Appl. Phys. 93, 2003, 3002.

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Research Institute for Technical Physics and Materials Science, H 1525, Budapest, P.O. Box 49, Hungary

    G. Radnóczi, Gy. J. Kovács, G. Sáfrán & O. Geszti

  2. Research Laboratory of Materials and Environmental Chemistry, Chemical Research Center, H-1525, Budapest, P.O. Box 17, Hungary

    T. Ujvári & I. Bertóti

  3. Institute of Electrical Engineering, Slovak Academy of Sciences, Dubravska Cesta 9, 84101, Bratislava, Slovakia

    K. Sedlácková

Authors
  1. G. Radnóczi
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Gy. J. Kovács
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. G. Sáfrán
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. K. Sedlácková
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. O. Geszti
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. T. Ujvári
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. I. Bertóti
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Editors and Affiliations

  1. UES Inc., Dayton, OH, USA

    Oleg N. Senkov

  2. Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson Air Force Base, OH, USA

    Daniel B. Miracle

  3. Frantcevich Institute for Problems of Materials Science, National Academy of Science of the Ukraine, Kiev, Ukraine

    Sergey A. Firstov

Rights and permissions

Reprints and permissions

Copyright information

© 2004 Kluwer Academic Publishers

About this paper

Cite this paper

Radnóczi, G. et al. (2004). Structure and Properties of Carbon Based Nanocomposite Films. In: Senkov, O.N., Miracle, D.B., Firstov, S.A. (eds) Metallic Materials with High Structural Efficiency. NATO Science Series II: Mathematics, Physics and Chemistry, vol 146. Springer, Dordrecht. https://doi.org/10.1007/1-4020-2112-7_9

Download citation

  • DOI: https://doi.org/10.1007/1-4020-2112-7_9

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-1-4020-2060-5

  • Online ISBN: 978-1-4020-2112-1

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics

Search

Navigation