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High-order terminal iterative learning control with an application to a rapid thermal process for chemical vapor deposition

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Iterative learning control

Part of the book series: Lecture Notes in Control and Information Sciences ((LNCIS,volume 248))

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Yangquan Chen PhD Changyun Wen PhD

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© 1999 Springer-Verlag London Limited

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(1999). High-order terminal iterative learning control with an application to a rapid thermal process for chemical vapor deposition. In: Chen, Y., Wen, C. (eds) Iterative learning control. Lecture Notes in Control and Information Sciences, vol 248. Springer, London. https://doi.org/10.1007/BFb0110121

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  • DOI: https://doi.org/10.1007/BFb0110121

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  • Publisher Name: Springer, London

  • Print ISBN: 978-1-85233-190-0

  • Online ISBN: 978-1-84628-539-4

  • eBook Packages: Springer Book Archive

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