Abstract
The use of a variety of diagnostics can offer significant insight into the mechanisms of laser ablation and film growth. It seems clear that under conditions of optimum film growth that significant collisional processes occur both within the laser-desorbed plume, and between the plume and the processing gas. These collisional processes are responsible for the macroscopic characteristics of the plume, including velocity and spatial distributions, the ratio of ions and particles to neutral atoms and molecules, and the incorporation of oxygen into the film. It is also obvious that real-time diagnostics, applicable under conditions relevant to film production, could provide useful process monitors and feedback control for the production of HTSC thin films.
This is a preview of subscription content, log in via an institution.
Preview
Unable to display preview. Download preview PDF.
References
J. T. Cheung, H. Sankur, CRC Crit Rev. Sol. St Mat. Sci. 15, 63–109 (1988).
H. Sankur, J. T. Cheung, Appl. Phys. A A47, 271–284 (l988).
D. J. Ehrlich, J. Y. Tsao, Laser Microfabrication (Thin Film Processes and Lithography) (Academic Press, Boston, 1989).
T. Venkatesan, et al., IEEE J. Quantum Electron 25, 2388–93 (1989).
J. Narayan, N. Biunno, R. Singh, O. W. Holland, O. Auciello, Appl. Phys. Lett. 51, 1845–7 (l987).
C. C. Chang, et al., Appl. Phys. Lett. 53, 517–19 (1988).
B. Roas, L. Schultz, G. Endres, Appl. Phys. Lett. 53, 557–1559 (1988).
G. Koren, A. Gupta, E. A. Giess, A. Segmuller, R. B. Laibowitz, Appl. Phys. Lett. 54,1054–1056 (1989).
K. M. Yoo, R. R. Alfano, X. Guo, M. P. Sarachik, L. L. Isaacs, Appl. Phys. Lett. 54, 1278–9 (1989).
O. Auciello, et al., Appl. Phys. Lett. 53, 72–4 (1988).
C. H. Chen, M. P. McCann, R. C. Phillips, Appl. Phys. Lett. 53, 2701–3 (1988).
D. B. Geohegan, D. N. Mashburn, Appl. Phys. Lett. 55, 2345–2347 (1989).
P. E. Dyer, R. D. Greenough, A. Issa, P. H. Key, Appl. Phys. Lett. 53, 534–6 (1988).
T. Venkatesan, et al., Appl. Phys. Lett. 53, 1431–3 (1988).
H.-J. Dietz, S. Becker, Int. J. Mass Spec. Ion Proc. 82, R1–R5 (1988).
C. H. Becker, J. B. Pallix, J. Appl. Phys. 64, 5152 (1988).
C. H. Chen, T. M. Murphy, R. C. Phillips, Appl. Phys. Lett. 57, 937–9 (1990).
P. K. Schenck, D. W. Bonnell, J. W. Hastie, J. Vac. Soc. A7, 1745–1749 (1989).
R. C. Estler, N. S. Nogar, J. Appl. Phys. 69, 1654–9 (1991).
R. C. Dye, R. E. Muenchausen, N. S. Nogar, Chem. Phys. Lett. in press, (1991).
N. S. Nogar, R. C. Estler, C. M. Miller, Anal. Chem. 57, 2441–4 (1985).
R. E. Muenchausen, et al., Appl. Phys. Lett. 56, 578–80 (1990).
R. W. Kelly, R. W. Dreyfus, Nucl. Instr. and Meth. B32, 321–348 (1988).
R. Kelly, J. Chem. Phys. 92, 5047–56 (1990).
L. Wiedeman, H. Helvajian, in Materials Research Society (MRS, 1990), pp. 217-222.
H. Dupendant, et al., Appl. Surf. Sci. 43, 369–376 (1989).
R. A. Neifeld, et al., J. Appl. Phys. 69, 1107–9 (1991).
J. P. Zheng, Z. O. Huang, D. T. Shaw, H. S. Kwok, Appl. Phys. Lett. 54, 280–282 (1989).
T. J. Geyer, W. A. Weimer, Appl. Spec. 44, 1659–1664 (1990).
K. Scott, J. M. Huntley, W. A. Phillips, J. Clarke, J. E. Field, Appl. Phys. Lett. 57, 922 (1990).
R. C. Tolman, The Principles of Statistical Mechanics, Dover, New York, 1979, Chapter VI.
Author information
Authors and Affiliations
Editor information
Rights and permissions
Copyright information
© 1991 Springer-Verlag
About this paper
Cite this paper
Nogar, N.S., Dye, R.C., Estler, R.C., Foltyn, S.R., Muenchausen, R.E., Wu, X.D. (1991). Diagnostic studies of YBa2Cu3O7−δ laser ablation. In: Miller, J.C., Haglund, R.F. (eds) Laser Ablation Mechanisms and Applications. Lecture Notes in Physics, vol 389. Springer, New York, NY. https://doi.org/10.1007/BFb0048347
Download citation
DOI: https://doi.org/10.1007/BFb0048347
Published:
Publisher Name: Springer, New York, NY
Print ISBN: 978-0-387-97731-7
Online ISBN: 978-0-387-34818-6
eBook Packages: Springer Book Archive