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New Developments in Semiconductor Physics pp 95–114Cite as

Electron microscopy in semiconductor physics

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Part of the book series: Lecture Notes in Physics ((LNP,volume 301))

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  1. Institut für Festkörperphysik und Elektronenmikroskopie der Akademie der Wissenschaften der DDR, DDR-4050, Weinberg 2, Germany

    J. Heydenreich

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  1. J. Heydenreich
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G. Ferenczi F. Beleznay

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© 1988 Springer-Verlag

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Heydenreich, J. (1988). Electron microscopy in semiconductor physics. In: Ferenczi, G., Beleznay, F. (eds) New Developments in Semiconductor Physics. Lecture Notes in Physics, vol 301. Springer, Berlin, Heidelberg. https://doi.org/10.1007/BFb0034419

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  • DOI: https://doi.org/10.1007/BFb0034419

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  • Print ISBN: 978-3-540-19215-2

  • Online ISBN: 978-3-540-39145-6

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