Abstract
The implementation of an expert system into the operating environment of an Electron Beam Tester (EBT) is presented. The concept of a knowledge based approach was chosen to meet the specific requirements for supporting the operation and maintenance of highly complex measurement equipment. The expert system KUSET (Knowledge-based User Support for Electron Beam Testing) allows an automatic online diagnosis of the EBT system's performance and offers a variety of tools to assure effectiveness and continuity in the EBT engineers work. A newly designed microprocessor-based hardware, the Modular Control System (MCS) provides a flexible and powerful link between the expert system KUSET and the hardware world of our measurement equipment.
This is a preview of subscription content, log in via an institution to check access.
Preview
Unable to display preview. Download preview PDF.
References
H. P. Feuerbaum: Electron beam testing: methods and applications. Scanning, Vol. 5, p. 14–24, 1983
E. Menzel, E. Kubalek: Fundamentals of electron beam testing of integrated circuits. Scanning, Vol. 5, p. 103–122, 1983
F. Alonso et al.: Knowledge engineering versus software engineering. Data & Knowledge Engineering, 5, p.79–91, 1990
G. Buchanan, E. Shortliffe (eds.) et al.: Rule-Based Expert Systems. Addison-Wesley Publishing Company, 1984
Navigation through complex diagnostics. Assembly Automation, Feb. 1990
M. Ben-Bassat et al.: On the evaluation of real life test expert systems. IEEE, 1989
ExperTeam GmbH: Xi Plus Reference Manual. 1990
D. Kennett K. Totton: Experience with an expert diagnostic system shell. Br. Telecom Technol. J., Vol. 7 No. 3, July 1989
J. Eklund et al.: A knowledge-based system for monitoring and trouble-shooting of production processes. Proc. of Power Plant Dyn., Knoxville, 1989
W. R. Simpson: POINTER — an intelligent maintenance aid. IEEE, 1989
G. Kahn, J. McDermott: The MUD System. IEEE Expert, Spring 1986
J. Fritz, R. Lackmann: Modular CAD environment for contactless testsystems. Proceed. of 2nd EEOBT, 1989
J. Fritz, R. Lackmann: A CAD coupled laser beam test system for digital circuit failure analysis. IEEE Proc. of 7th Int. Electr. Manufact. Tech. Symp., San Francisco, Sep. 1989
N. Kuji, T. Tamama: An automated e-beam tester with CAD interface, “FINDER”: a powerful tool for fault diagnosis of ASICs. Proc. of Intern. Test Conf., paper 23.3, 1986
M. Marzouki, B. Courtois: Debugging integrated circuits: A.I. can help!”. IEEE, 1989
Author information
Authors and Affiliations
Editor information
Rights and permissions
Copyright information
© 1992 Springer-Verlag Berlin Heidelberg
About this paper
Cite this paper
Weichert, G., Lackmann, R. (1992). KUSET — Knowledge based User Support for Electron Beam Testing. In: Belli, F., Radermacher, F.J. (eds) Industrial and Engineering Applications of Artificial Intelligence and Expert Systems. IEA/AIE 1992. Lecture Notes in Computer Science, vol 604. Springer, Berlin, Heidelberg. https://doi.org/10.1007/BFb0025000
Download citation
DOI: https://doi.org/10.1007/BFb0025000
Published:
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-55601-5
Online ISBN: 978-3-540-47251-3
eBook Packages: Springer Book Archive