KUSET — Knowledge based User Support for Electron Beam Testing

  • G. Weichert
  • R. Lackmann
Knowledge-Based Systems I
Part of the Lecture Notes in Computer Science book series (LNCS, volume 604)


The implementation of an expert system into the operating environment of an Electron Beam Tester (EBT) is presented. The concept of a knowledge based approach was chosen to meet the specific requirements for supporting the operation and maintenance of highly complex measurement equipment. The expert system KUSET (Knowledge-based User Support for Electron Beam Testing) allows an automatic online diagnosis of the EBT system's performance and offers a variety of tools to assure effectiveness and continuity in the EBT engineers work. A newly designed microprocessor-based hardware, the Modular Control System (MCS) provides a flexible and powerful link between the expert system KUSET and the hardware world of our measurement equipment.


expert system diagnosis electron beam testing integrated circuits 


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Copyright information

© Springer-Verlag Berlin Heidelberg 1992

Authors and Affiliations

  • G. Weichert
    • 1
  • R. Lackmann
    • 1
  1. 1.Fraunhofer Institut für Mikroelektronische Schaltungen und SystemeDuisburg 1FRG

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