Abstract
During performing AFM-based nano-manipulations, traditional method is unstable, and the manipulation efficiency is low due to the uncertainty of the AFM tip position. As for these problems, this paper refers to the macro-robot caging strategy, proposes to plan the tip maneuvering trajectory using the “Z-shape” path to form a virtual nano-hand. Then, the model parameters are discussed and optimized through simulation. Meanwhile, the Monte Carlo method is used to illustrate the effectiveness of the optimization. The simulation result indicates that the optimized parameters can make the manipulation more stable and efficient. Finally, the AFM experiment with optimized parameters is carried out to verify the effectiveness and stability of the virtual nano-hand method.
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Yuan, S., Chu, T., Hou, J. (2021). Path Planning of AFM-Based Manipulation Using Virtual Nano-hand. In: Li, Y., Zhu, Q., Qiao, F., Fan, Z., Chen, Y. (eds) Advances in Simulation and Process Modelling. ISSPM 2020. Advances in Intelligent Systems and Computing, vol 1305. Springer, Singapore. https://doi.org/10.1007/978-981-33-4575-1_45
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DOI: https://doi.org/10.1007/978-981-33-4575-1_45
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