Abstract
In this paper, we designed and fabricated an optical phased array with a narrow antenna spacing in silicon on insulator. The crosstalk is reduced substantially with a spacing of only 0.9 μm between antennas using superlattice grating waveguides. A transversal 24.2° beam steering range was observed in the far-field of view by tuning the voltages on each channel. Meanwhile, by sweeping the wavelength from 1540 to 1570 nm, the main beam can scan in a range of 6.45° in the longitudinal direction.
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Acknowledgements
This work is supported by National Natural Science Foundation of China (NSFC) (Grants 61675084 and 61775094), and by the Opened Fund of the State Key Laboratory of Integrated Optoelectronics No. IOSKL2018KF14.
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Zhang, H., Liu, Q., Yuan, Q., Huang, Q. (2021). Two-Dimensional Beam Steering in Optical Phased Array with Grating Array Superlattices. In: Peng, Y., Dong, X. (eds) Proceedings of 2019 International Conference on Optoelectronics and Measurement. Lecture Notes in Electrical Engineering, vol 726. Springer, Singapore. https://doi.org/10.1007/978-981-33-4110-4_12
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DOI: https://doi.org/10.1007/978-981-33-4110-4_12
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