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Dual-Mass Linear Vibration Silicon Based MEMS Gyroscope Monitoring Circuit Design and Test Technology

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Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope
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Abstract

In the form of analog circuit according to the analysis and related parameters of the drive circuit, detection interface, quadraturely coupled stiffness nulling circuit and PIPLC detection closed-loop circuit controller on the printed circuit board.

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Correspondence to Huiliang Cao .

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Cao, H. (2023). Dual-Mass Linear Vibration Silicon Based MEMS Gyroscope Monitoring Circuit Design and Test Technology. In: Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope. Springer, Singapore. https://doi.org/10.1007/978-981-19-9247-6_7

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  • DOI: https://doi.org/10.1007/978-981-19-9247-6_7

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  • Publisher Name: Springer, Singapore

  • Print ISBN: 978-981-19-9246-9

  • Online ISBN: 978-981-19-9247-6

  • eBook Packages: EngineeringEngineering (R0)

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