Abstract
In the late 1980s, large scale and very large-scale integrated circuits appeared in the field of microelectronics science, making the integration of the circuit continuously improved, and the processing size is becoming smaller and smaller.
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Cao, H. (2023). Introduction. In: Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope. Springer, Singapore. https://doi.org/10.1007/978-981-19-9247-6_1
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DOI: https://doi.org/10.1007/978-981-19-9247-6_1
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Publisher Name: Springer, Singapore
Print ISBN: 978-981-19-9246-9
Online ISBN: 978-981-19-9247-6
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