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Consistent Manufacturing of Macro, Micro and Nano Cross-Scale Structures

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Fundamental Research on Nanomanufacturing

Part of the book series: Reports of China’s Basic Research ((RCBR))

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Abstract

Nanotechnology is widely used in many fields such as information, optoelectronics, materials, environment, energy, biology, medicine and national defense security. Nanostructure is the functional carrier of almost all nano devices/products/systems, and its forming principle and method are one of the research focuses of nanomanufacturing. Taking a planar lens as an example, a lens with a thickness of only 1 μm can focus all kinds of light waves of any polarization state at one point, and its imaging performance is equivalent to that of a first-class complex lens system. The functional carrier of planar lens is its nanostructure, which is mainly characterized by “super pixel” structure with characteristic scale below tens of nanometers; nanostructured materials are functional materials, such as photoelectric materials like TiO2; the scale of device or system level can reach more than tens of millimeters, ensuring large format consistency and morphology accuracy.

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Author information

Authors and Affiliations

  1. Xi’an Jiaotong University, Xi’an, Shaanxi, China

    Bingheng Lu

  2. Tsinghua University, Beijing, China

    Jianbin Luo

  3. Xiamen University, Xiamen, Fujian, China

    Zhongqun Tian

  4. Dalian University of Technology, Dalian, Liaoning, China

    Dongming Guo

  5. Huazhong University of Science and Technology, Wuhan, Hubei, China

    Han Ding

  6. Institute of Physics, Chinese Academy of Sciences, Beijing, China

    Changzhi Gu

  7. Tianjin University, Tianjin, China

    Zhihong Li

  8. School of Microelectronics, University of Science and Technology of China, Hefei, Anhui, China

    Ming Liu

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  1. Bingheng Lu
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  5. Han Ding
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  8. Ming Liu
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Corresponding author

Correspondence to Bingheng Lu .

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  1. Xi'an Jiaotong University, Xi'an, Shaanxi, China

    Bingheng Lu

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Lu, B. et al. (2023). Consistent Manufacturing of Macro, Micro and Nano Cross-Scale Structures. In: Lu, B. (eds) Fundamental Research on Nanomanufacturing. Reports of China’s Basic Research. Springer, Singapore. https://doi.org/10.1007/978-981-19-8975-9_4

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  • DOI: https://doi.org/10.1007/978-981-19-8975-9_4

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  • Publisher Name: Springer, Singapore

  • Print ISBN: 978-981-19-8974-2

  • Online ISBN: 978-981-19-8975-9

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