Abstract
In the twenty-first century, biosensors have gathered much wider attention than ever before, irrespective of the technology that promises to bring them forward. With the recent COVID-19 outbreak, the concern and efforts to restore global health and well-being are rising at an unprecedented rate. A requirement to develop precise, fast, point-of-care, reliable, easily disposable/reproducible and low-cost diagnostic tools has ascended. Biosensors form a primary element of hand-held medical kits, tools, products, and/or instruments. They have a very wide range of applications such as nearby environmental checks, detecting the onset of a disease, food quality, drug discovery, medicine dose control, and many more. This chapter explains how Nano/Micro-Electro-Mechanical Systems (N/MEMS) can be enabling technology toward a sustainable, scalable, ultra-miniaturized, easy-to-use, energy-efficient, and integrated bio/chemical sensing system. This study provides a deeper insight into the fundamentals, recent advances, and potential end applications of N/MEMS sensors and integrated systems to detect and measure the concentration of biological and/or chemical analytes. Transduction principle/s, materials, efficient designs, including readout technique, and sensor performance are explained. This is followed by a discussion on how N/MEMS biosensors continue to evolve. The challenges and possible opportunities are also discussed.
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References
Haleem A, Javaid M, Singh RP, Suman R, Rab S (2021) Biosensors applications in medical field: A brief review
Mohankumar P, Ajayan J, Mohanraj T, Yasodharan R (2021) Recent developments in biosensors for healthcare and biomedical applications: A review. Meas J Int Meas Confed 167. https://doi.org/10.1016/j.measurement.2020.108293
Choi JR (2020) Development of point-of-care biosensors for COVID-19
Pachkawade V, Tse Z (2022) MEMS sensor for detection and measurement of ultra-fine particles. Eng Res Express 4:022002. https://doi.org/10.1088/2631-8695/ac743a
Pachkawade V, Tse Z (2021) MEMS sensor for detection and measurement of ultra-fine particles: A review
Pachkawade V, Li CSC-S, Li SSS-S (2012) A fully-differential CMOS-MEMS resonator integrated with an on-chip amplifier. In: Proceedings of IEEE sensors
Pachkawade V (2021) State-of-the-art in mode-localized MEMS coupled resonant sensors: A comprehensive review. IEEE Sens J. https://doi.org/10.1109/JSEN.2021.3051240
Leïchlé, T., Nicu, L., Alava, T.: MEMS Biosensors and COVID-19: Missed Opportunity, (2020)
Timurdogan E, Alaca BE, Kavakli IH, Urey H (2011) MEMS biosensor for detection of Hepatitis A and C viruses in serum. Biosens Bioelectron 28. https://doi.org/10.1016/j.bios.2011.07.014
Erdil K, Akcan G, Gül Ö, Gökdel YD (2022) A disposable MEMS biosensor for aflatoxin M1 molecule detection. Sens Actuators Phys 338. https://doi.org/10.1016/j.sna.2022.113438
Wang Y, Zhao C, Wang C, Cerica D, Baijot M, Pachkawade et al (2017) A reversible method to characterize the mass sensitivity of a 3-Dof mode localized coupled resonator under atmospheric pressure. Proceedings 1: 493. https://doi.org/10.3390/proceedings1040493
Liu CF, Wang MH, Jang LS (2018) Microfluidics-based hairpin resonator biosensor for biological cell detection. Sens Actuators, B Chem 263. https://doi.org/10.1016/j.snb.2018.01.234
Keegan N, Hedley J, Hu ZX, Spoors JA, Waugh W et al (2012) Piezoelectrically actuated circular diaphragm resonator mass sensors. In: 2012 7th IEEE International conference on nano/micro engineered and molecular systems, NEMS 2012
Lee C, Yee ASP, Perera JLJ, Chen et al (2008) Design of nanobiophotonics resonators for biomolecules detection. In: 3rd IEEE International conference on nano/micro engineered and molecular systems, NEMS)
Ducloux O, Park JW, Tiercelin N, Pernod P, Preobrazhensky V, Hamon M et al (2009) MEMS resonators actuated by TbCo/FeCo nanostructured magnetostrictive multilayers in a liquid environment. In: TRANSDUCERS 2009—15th International conference on solid-state sensors, actuators, and microsystems
Li DJ, Chen HY, Liu CR, Fan K, Wang GF (2021) A review on MEMS/NEMS-based biosensor
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Pachkawade, V. (2023). N/MEMS Biosensors: An Introduction. In: Guha, K., Dutta, G., Biswas, A., Srinivasa Rao, K. (eds) MEMS and Microfluidics in Healthcare. Lecture Notes in Electrical Engineering, vol 989. Springer, Singapore. https://doi.org/10.1007/978-981-19-8714-4_1
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DOI: https://doi.org/10.1007/978-981-19-8714-4_1
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