Abstract
Single crystal lutetium oxide (Lu2O3) have drawn intense attention in applications for high performance solid-state lasers because of its excellent thermo-mechanical properties and broad amplification bandwidth. However, the hard and brittle nature of single crystal Lu2O3 needs to be overcome during the finishing process. In this study, the single crystal Lu2O3 is polished by cerium oxide (CeO2) slurry, and the effects of the applied force on surface roughness and on the materials removal rate are studied experimentally. The surface characteristics are analyzed using optical interferometry. The surface roughness of 0.9 nm in Ra is achieved by mechanical polishing. The trajectory of polishing abrasive is also studied by simulation, and the influence on materials removal rate is discussed. This work provides a theoretical basis and technical support for the superfinishing of single crystal Lu2O3.
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Acknowledgments
This study is supported by the National Key Research and Development Program of China (Grant No.2016YFB1102203) and Science Challenge Project (Grant No. TZ2018006–0201-01).
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Liu, Z., Lyu, P., Lai, M., Fang, F. (2022). Study on Superfinishing of Single Crystal Lutetium Oxide by Cerium Oxide Slurry. In: Yang, S., Luo, X., Yan, Y., Jiang, Z. (eds) Proceedings of the 7th International Conference on Nanomanufacturing (nanoMan2021). nanoMan 2021. Smart Innovation, Systems and Technologies, vol 296. Springer, Singapore. https://doi.org/10.1007/978-981-19-1918-3_10
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