Abstract
The paper presents the design and simulation of nanoscale silicon nanowire-based piezoresistive pressure sensor suited for medical applications. The sensor designed is well suited for low pressure sensing predominantly seen in medical field. Pressure sensors are extensively used in measurement of blood pressure in medical applications. In the design, silicon nanowires are considered as piezoresistors, replacing the conventional silicon-based piezoresistors. Two different nano piezoresistive pressure sensors are designed and simulated. The sensitivities obtained from the two models are considerably high, supporting the potential usage of nano sensors in medical domain. The sensitivity obtained from the first model is 68.257 mV/V/MPa. The second model is designed and developed emphasizing increase in sensitivity. The sensitivity obtained from the second model is 129.18 mV/V/MPa. The sensor is tested and analyzed over the pressure range of 0–1 MPa. All the dimensions of the sensor are in nanoscale.
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Pidashetti, S., Balavalad, K.B. (2022). Design and Development of Silicon Nanowire-Based Pressure Sensor for Medical Applications. In: Satapathy, S.C., Bhateja, V., Favorskaya, M.N., Adilakshmi, T. (eds) Smart Intelligent Computing and Applications, Volume 2. Smart Innovation, Systems and Technologies, vol 283. Springer, Singapore. https://doi.org/10.1007/978-981-16-9705-0_10
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DOI: https://doi.org/10.1007/978-981-16-9705-0_10
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