Abstract
This Chapter presents design, development, and characterization of broadband (1–30 GHz) microelectromechanical systems (MEMS) based electrostatically driven vertical and lateral switching networks. Initially, single switch performances are optimized, and the same switch is used to develop different switching networks starting from single-pole-double-thru (SPDT) to single-pole-fourteen-thru (SP14T) using vertically actuated beams. The vertically actuated switch is designed using three springs to gain the mechanical stability. Later, laterally driven single MEMS switches are designed, fabricated, and tested. Lateral switch is designed with a mechanical springs and stopper to improve the stability without compromising the electromagnetic performances. The lateral switch doesn’t use any dielectric layers. The operation principle of the lateral switch is described in detail. Both switch types (vertical and lateral) are electrostatically driven and implemented on coplanar waveguide transmission line. Switch performances is given importance over a broadband spectrum. The S-parameter performances of all switching networks are described in detail with design guidelines. All experimental results are validated with a circuit analysis and full-wave EM simulation.
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Koul, S.K., Dey, S. (2022). Micromachined Single-Pole-Multi-throw Switching Networks. In: Micromachined Circuits and Devices. Lecture Notes in Electrical Engineering, vol 859. Springer, Singapore. https://doi.org/10.1007/978-981-16-9443-1_4
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DOI: https://doi.org/10.1007/978-981-16-9443-1_4
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