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Structure and Properties of Nitride Coatings Based on Ti and Cr Synthesized by PIII&D Technique

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Microstructure and Properties of Micro- and Nanoscale Materials, Films, and Coatings (NAP 2019)

Part of the book series: Springer Proceedings in Physics ((SPPHY,volume 240))

Abstract

The results of studies of the structure, stress, and hardness of Ti–N, Cr–N and Ti–Cr–N coatings deposited by the PIII&D method using the rectilinear vacuum-arc plasma filter are presented. X-ray structural analysis was used to study the effect of the pulse bias potential amplitude in the range from 0.5 to 1.5 kV on the characteristics of the coatings. In accordance with the composition of the cathode, the coatings have the nanocrystalline cubic structure TiN, CrN or solid solution (Ti, Cr)N (structural type NaCl) with axial texture [110]. The content of Cr in (Ti, Cr)N coatings is 1.5 times higher than in the cathode. It was found that the change of the pulse bias potential amplitude practically does not affect the elemental composition of the coatings. The level of compression stress and the size of crystallites in (Ti, Cr)N coatings are less than in TiN coatings obtained under similar conditions. All TiN and (Ti, Cr)N coatings have a high hardness of 29–36 GPa.

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Acknowledgements

This research was carried out within the framework of the joint scientific project of the National Academy of Sciences of Ukraine and the National Academy of Sciences of Belarus “Creation of radiation-resistant nanostructured metal and nitride coatings based on titanium, aluminum, and chromium by vacuum-arc deposition from filtered plasma”, 2018 (Reg. No. of Ukrainian projects: 02-03-18).

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Authors and Affiliations

  1. National Science Center “Kharkov Institute of Physics and Technology”, Kharkiv, Ukraine

    V. V. Vasyliev, A. I. Kalinichenko, A. A. Luchaninov, E. N. Reshetnyak & V. E. Strel’nitskij

  2. A. N. Sevchenko Institute of Applied Physics Problems, Belarusian State University, Minsk, Belarus

    F. F. Komarov & S. V. Konstantinov

Authors
  1. V. V. Vasyliev
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  2. A. I. Kalinichenko
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  3. F. F. Komarov
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  4. S. V. Konstantinov
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  5. A. A. Luchaninov
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  6. E. N. Reshetnyak
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  7. V. E. Strel’nitskij
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Corresponding author

Correspondence to V. E. Strel’nitskij .

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Editors and Affiliations

  1. Sumy State University, Sumy, Ukraine

    Alexander D. Pogrebnjak

  2. Sumy State University, Sumy, Ukraine

    Oleksandr Bondar

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Vasyliev, V.V. et al. (2020). Structure and Properties of Nitride Coatings Based on Ti and Cr Synthesized by PIII&D Technique. In: Pogrebnjak, A., Bondar, O. (eds) Microstructure and Properties of Micro- and Nanoscale Materials, Films, and Coatings (NAP 2019). Springer Proceedings in Physics, vol 240. Springer, Singapore. https://doi.org/10.1007/978-981-15-1742-6_10

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  • DOI: https://doi.org/10.1007/978-981-15-1742-6_10

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  • Publisher Name: Springer, Singapore

  • Print ISBN: 978-981-15-1741-9

  • Online ISBN: 978-981-15-1742-6

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