Abstract
In laser heat-mode lithography, the resist thin films absorb the laser spot energy and are heated, and then experience a structural change when the temperature exceeds to certain threshold point, such as crystallization, melting, and gasification.
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Wei, J. (2019). Manipulation of Thermal Diffusion Channels. In: Laser Heat-Mode Lithography. Springer Series in Materials Science, vol 291. Springer, Singapore. https://doi.org/10.1007/978-981-15-0943-8_4
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DOI: https://doi.org/10.1007/978-981-15-0943-8_4
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