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Laser Heat-Mode Lithography pp 49–79Cite as

High-Speed Rotation-Type Laser Heat-Mode Lithography System

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Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 291))

Abstract

Laser heat-mode lithography can write micro/nanostructures on the heat-sensitive resist thin-film materials. When one uses the traditional direct laser writing system to conduct heat-mode lithography, the writing speed is slow. For example, the real velocity of traditional x–y-type vector-mode writing is only several millimeters or centimeters per second due to continuous deceleration.

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References

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Authors and Affiliations

  1. Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai, China

    Jingsong Wei

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  1. Jingsong Wei
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Correspondence to Jingsong Wei .

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Wei, J. (2019). High-Speed Rotation-Type Laser Heat-Mode Lithography System. In: Laser Heat-Mode Lithography. Springer Series in Materials Science, vol 291. Springer, Singapore. https://doi.org/10.1007/978-981-15-0943-8_3

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  • DOI: https://doi.org/10.1007/978-981-15-0943-8_3

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  • Publisher Name: Springer, Singapore

  • Print ISBN: 978-981-15-0942-1

  • Online ISBN: 978-981-15-0943-8

  • eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)

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