Key Technical Problems of Femtosecond Laser Bionic Surfaces

Chapter
Part of the Springer Theses book series (Springer Theses)

Abstract

Researchers of micro/nano engineering laboratory of University of Science and Technology of China have established the femtosecond laser micro/nanofabrication system since 2001, as shown in Fig. 2.1. This micro/nanofabrication system is composed of femtosecond laser system, precision processing system, and control system.

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Copyright information

© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.Department of Precision Instrument and MachineryUniversity of Science and Technology of ChinaHefeiChina

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