Application of Suresh and Lee Models in the Measurement of Residual Stress of Films



The thin film materials with small volume and high reliability have become an integral part of microelectromechanical systems and have a wide range of applications in national defense, aerospace, communication, automobile manufacturing, and other fields. The service reliability and service life are determined by the mechanical properties of thin film materials.


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© Springer Nature Singapore Pte Ltd. and Science Press 2018

Authors and Affiliations

  1. 1.National Key Laboratory for RemanufacturingAcademy of Armored Forces EngineeringBeijingChina
  2. 2.China University of GeosciencesBeijingChina

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