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Metal-Oxide Nanostructures Designed by Glancing Angle Deposition Technique and Its Applications on Sensors and Optoelectronic Devices: A Review

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VLSI Design and Test (VDAT 2017)

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Abstract

Glancing angle deposited (GLAD) metal-oxide nanostructure films are promising materials for sensors and optoelectronic devices application due to the easy fabrication process, structural dependent properties and a large surface to volume ratio. This paper focuses on the literature reviews of metal-oxide nanostructures deposited by GLAD using all the possible deposition techniques such as thermal/electron-beam evaporation, sputtering magnetron, and pulsed laser deposition. The principle behind the formation of nanostructure through GLAD has also been discussed in details. The detailed analysis of the devices and their principle based on GLAD deposited metal-oxide nanostructures for different optoelectronic and sensor devices are also presented. This literature review will be helpful to understand and explore more on the growth of metal-oxide nanostructures using glancing angle deposition technique for futuristic sensors and optoelectronic device applications.

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Acknowledgment

This work was supported by Department of Electronics & Communication Engineering, National Institute of Technology Manipur.

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Authors and Affiliations

  1. National Institute of Technology, Imphal, Manipur, India

    Divya Singh

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  1. Divya Singh
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Correspondence to Divya Singh .

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  1. Indian Institute of Technology Roorkee, Roorkee, India

    Brajesh Kumar Kaushik

  2. Indian Institute of Technology Roorkee, Roorkee, India

    Sudeb Dasgupta

  3. Indian Institute of Technology Bombay, Mumbai, India

    Virendra Singh

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Singh, D. (2017). Metal-Oxide Nanostructures Designed by Glancing Angle Deposition Technique and Its Applications on Sensors and Optoelectronic Devices: A Review. In: Kaushik, B., Dasgupta, S., Singh, V. (eds) VLSI Design and Test. VDAT 2017. Communications in Computer and Information Science, vol 711. Springer, Singapore. https://doi.org/10.1007/978-981-10-7470-7_38

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  • DOI: https://doi.org/10.1007/978-981-10-7470-7_38

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  • Online ISBN: 978-981-10-7470-7

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