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Study of Microstructure and Microhole Fabrication on PDMS by Femtosecond Laser Direct Writing Technique for Development of Miniaturized Photonic Devices

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Optical and Wireless Technologies

Part of the book series: Lecture Notes in Electrical Engineering ((LNEE,volume 472))

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Abstract

Microhole drilling and microstructures fabrication on polymer material have been carried out using femtosecond laser. The characterization of the device has been performed using optical microscope and profilometer. Parametric study on effect of laser pulse energy, scan speed, and depth of focusing has been presented. The findings from this study can be utilized to improve the performance and quality of many photonic devices.

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References

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Acknowledgements

The experiential work leading to concluding the result presented in this paper has been performed at the Femtosecond facility of CELP IIT Kanpur.

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Correspondence to Sanyogita .

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© 2018 Springer Nature Singapore Pte Ltd.

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Sanyogita, Ghar, A., Das, U., Panigrahi, P.K. (2018). Study of Microstructure and Microhole Fabrication on PDMS by Femtosecond Laser Direct Writing Technique for Development of Miniaturized Photonic Devices. In: Janyani, V., Tiwari, M., Singh, G., Minzioni, P. (eds) Optical and Wireless Technologies. Lecture Notes in Electrical Engineering, vol 472. Springer, Singapore. https://doi.org/10.1007/978-981-10-7395-3_17

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  • DOI: https://doi.org/10.1007/978-981-10-7395-3_17

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  • Publisher Name: Springer, Singapore

  • Print ISBN: 978-981-10-7394-6

  • Online ISBN: 978-981-10-7395-3

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