Study of Microstructure and Microhole Fabrication on PDMS by Femtosecond Laser Direct Writing Technique for Development of Miniaturized Photonic Devices

  • Sanyogita
  • Amar Ghar
  • Utpal Das
  • P. K. Panigrahi
Conference paper
Part of the Lecture Notes in Electrical Engineering book series (LNEE, volume 472)


Microhole drilling and microstructures fabrication on polymer material have been carried out using femtosecond laser. The characterization of the device has been performed using optical microscope and profilometer. Parametric study on effect of laser pulse energy, scan speed, and depth of focusing has been presented. The findings from this study can be utilized to improve the performance and quality of many photonic devices.


Photonic devices Femtosecond laser fabrication Microhole Microstructure and PDMS 



The experiential work leading to concluding the result presented in this paper has been performed at the Femtosecond facility of CELP IIT Kanpur.


  1. 1.
    Sugioka K, Cheng Y, Midorikawa K (2005) Three-dimensional micromachining of glass using femtosecond laser for lab-on-a-chip device manufacture. Appl Phys A 81:1–10CrossRefGoogle Scholar
  2. 2.
    Zhao X, Shin YC (2011) Femtosecond laser drilling of high-aspect ratio micro channels in glass. Appl Phys A Mater Sci Process 104(2):713–719CrossRefGoogle Scholar
  3. 3.
    Darvishi S, Cubaud T, Longtin JP (2011) Ultrafast laser machining of tapered micro channels in glass and PDMS. Opt Lasers Eng 50(2):210–214CrossRefGoogle Scholar
  4. 4.
    Huang H (2003) Micro-hole drilling with femtosecond fiber laser. In: Proceedings of SPIE Photonics, vol 8607–19Google Scholar
  5. 5.
    Yong J et al (2013) Femtosecond laser weaving superhydrophobic patterned PDMS surfaces with tunable adhesion. J Phys Chem C 117:24907–24912CrossRefGoogle Scholar
  6. 6.
    Yong J et al (2013) Controllable adhesive superhydrophobic surfaces based on PDMS microwell arrays. Langmuir 29:3274–3279CrossRefGoogle Scholar

Copyright information

© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  • Sanyogita
    • 1
  • Amar Ghar
    • 1
  • Utpal Das
    • 1
  • P. K. Panigrahi
    • 1
  1. 1.Center for Lasers and PhotonicsIITKanpurIndia

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