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Study of Microstructure and Microhole Fabrication on PDMS by Femtosecond Laser Direct Writing Technique for Development of Miniaturized Photonic Devices

  • Sanyogita
  • Amar Ghar
  • Utpal Das
  • P. K. Panigrahi
Conference paper
Part of the Lecture Notes in Electrical Engineering book series (LNEE, volume 472)

Abstract

Microhole drilling and microstructures fabrication on polymer material have been carried out using femtosecond laser. The characterization of the device has been performed using optical microscope and profilometer. Parametric study on effect of laser pulse energy, scan speed, and depth of focusing has been presented. The findings from this study can be utilized to improve the performance and quality of many photonic devices.

Keywords

Photonic devices Femtosecond laser fabrication Microhole Microstructure and PDMS 

Notes

Acknowledgements

The experiential work leading to concluding the result presented in this paper has been performed at the Femtosecond facility of CELP IIT Kanpur.

References

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Copyright information

© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  • Sanyogita
    • 1
  • Amar Ghar
    • 1
  • Utpal Das
    • 1
  • P. K. Panigrahi
    • 1
  1. 1.Center for Lasers and PhotonicsIITKanpurIndia

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