Abstract
Multi-cluster tools are widely used in semiconductor manufacturing. Recently, semiconductor manufacturing industry shows to reduce the wafer lot size, down to just a few, even being only 5–8 wafers. In such cases, it is impossible to apply a cyclic scheduling method since there is no cyclic action sequence. Therefore, this paper mainly focuses on the application of noncyclic scheduling with a unified description for different problems which contains serial flow, parallel flow and re-entrant flow. Moreover, a reachability graph model is developed based on the unified description, and then a dynamic decision method is used to search the optimal solution in the reachability graph. A series of experiments are conducted, and it shows that the proposed method is effective for noncyclic scheduling of multi-cluster tools.
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Yan, Y., Wang, H., Fan, W. (2018). Dynamic Decision Based Noncyclic Scheduling of Multi-cluster Tools. In: Deng, Z. (eds) Proceedings of 2017 Chinese Intelligent Automation Conference. CIAC 2017. Lecture Notes in Electrical Engineering, vol 458. Springer, Singapore. https://doi.org/10.1007/978-981-10-6445-6_27
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DOI: https://doi.org/10.1007/978-981-10-6445-6_27
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