Reflection High-Energy Electron Diffraction

  • Yoshimi HorioEmail author


Reflection High-Energy Electron Diffraction (RHEED) (Ichimiya and Cohen in Reflection high-energy electron diffraction, Cambridge University Press, Cambridge, 2004 [1]) is one of the powerful methods for surface structural analysis.


Surface structure Thin film growth Electron diffraction 


  1. 1.
    Ichimiya, A., Cohen, P.I.: Reflection high-energy electron diffraction. Cambridge University Press, Cambridge, UK (2004)CrossRefGoogle Scholar
  2. 2.
    Joyce, B.A., Dobson, P.J., Neave, J.H., Woodbridge, K., Zhang, J., Larsen, P.K., Bolger, B.: RHEED studies of heterojunction and quantum well formation during MBE growth—from multiple scattering to band offsets. Surf. Sci. 168, 423–438 (1986)CrossRefGoogle Scholar
  3. 3.
    Horio, Y.: Zero-loss reflection high-energy electron diffraction patterns and rocking curves of the Si(111) 7 × 7 surface obtained by energy filtering. Jpn. J. Appl. Phys. 35, 3559–3564 (1996)CrossRefGoogle Scholar
  4. 4.
    Horio, Y.: Structure analysis of Si(111) √3 × √3—A1 surface by energy-filtered RHEED. Surf. Rev. Lett. 4, 977–983 (1997)CrossRefGoogle Scholar

Copyright information

© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.Department of Electrical and Electronic Engineering, School of EngineeringDaido UniversityNagoyaJapan

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