High-Resolution Elastic Recoil Detection Analysis

  • Kaoru NakajimaEmail author


HERDA is an advanced type of Elastic Recoil Detection Analysis (ERDA), depth resolution of which is improved. Figure 40.1 shows a schematic illustration of HERDA. In HERDA, as in a conventional ERDA, a well-collimated beam of monoenergetic He or heavier ions is incident on a solid sample.
Fig. 40.1

Schematic illustration of HERDA


Ion scattering Hydrogen Light element Depth profiling High depth resolution 


  1. 1.
    Dollinger, G., Frey, C.M., Bergmaier, A., Faestermann, T.: Elastic recoil detection with single atomic layer depth resolution. Nucl. Instr. Meth. Phys. Res. B 136–138, 603–610 (1998)CrossRefGoogle Scholar
  2. 2.
    Carstanjen, H.D.: Ion beam analysis with monolayer depth resolution. Nucl. Instr. Meth. Phys. Res. B 136, 1183–1190 (1998)CrossRefGoogle Scholar
  3. 3.
    Kimura, K., Nakajima, K., Imura, H.: Hydrogen depth profiling with sub-nm resolution in high-resolution ERD. Nucl. Instr. Meth. Phys. Res. B 140, 397–401 (1998)CrossRefGoogle Scholar
  4. 4.
    Hayashi, K., Kawakami, N., Ichihara, C., Kobashi, K.: Characterization of subsurface hydrogen in diamond films by high-resolution elastic recoil detection analysis. Phys. B 376–377, 307–310 (2006)CrossRefGoogle Scholar
  5. 5.
    Nakajima, K., Imaizumi, R., Suzuki, M., Kimura, K.: Accumulation of hydrogen near the interface between ultrathin SiO2 and Si(001) under ion irradiation in high-resolution elastic recoil detection. Nucl. Instr. Meth. Phys. Res. B 249, 425–428 (2006)CrossRefGoogle Scholar

Copyright information

© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  1. 1.Department of Micro Engineering, Graduate School of EngineeringKyoto UniversityKyotoJapan

Personalised recommendations