Abstract
Conventional SEM normally has vacuum environment between electron optic column and specimen chamber so that electron beam-emitted electron source travels to specimen without being scattered by gas molecular.
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References
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Ominami, Y., et al.: A Novel Approach to Scanning Electron Microscopy at Ambient Atmospheric Pressure. Microscopy 64, 97–104 (2015)
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Ominami, Y. (2018). Environmental SEM (Atmospheric SEM). In: The Surface Science Society of Japan (eds) Compendium of Surface and Interface Analysis. Springer, Singapore. https://doi.org/10.1007/978-981-10-6156-1_28
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DOI: https://doi.org/10.1007/978-981-10-6156-1_28
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