Abstract
In general, since the amplitude and phase are different between the p- and s-polarizations of the reflected light, the reflected light is elliptically polarized. Ellipsometry precisely measures the shape of reflection ellipse by irradiating totally polarized light to a planer bulk surface, a thin film, and a multilayer.
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Tsuru, T. (2018). Ellipsometry. In: The Surface Science Society of Japan (eds) Compendium of Surface and Interface Analysis. Springer, Singapore. https://doi.org/10.1007/978-981-10-6156-1_27
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DOI: https://doi.org/10.1007/978-981-10-6156-1_27
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