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Comparative Analysis of MEMS Piezoelectric Materials for the Design of a Piezotube-Type Pressure Sensor

  • Sachin Kala
  • Varij Panwar
  • Lokesh Panwar
  • Sushant Sharma
Conference paper
Part of the Advances in Intelligent Systems and Computing book series (AISC, volume 624)

Abstract

MEMS-based pressure sensors with high voltage sensitivity can be used in many areas of MEMS, biomedical, optical displays, automobile, etc. This paper focuses on the comparison of various types of MEMS piezoelectric materials which sense and convert the mechanical energy into electrical energy using MEMS technology. The model designing and working principle of proposed MEMS Piezotube-type pressure sensor is elucidated here. The modeling and simulation of MEMS Piezotube pressure sensor is done using COMSOL 5.2. The displacement of piezoelectric material and induced electric potential analysis are carried out for various types of MEMS piezoceramic materials. This paper shows the study of voltage generation using direct piezoelectric effect. Here, analysis is done in centimeter range making two sets of boundary conditions where internal fluid pressure of various ranges is applied onto MEMS Piezotube-type pressure sensor using various piezoceramic materials. Furthermore, analyses are done with increased value of pressure, but now the pressure is applied externally. The new result shows that there is a huge increment in induced electric potential on increasing the pressure and dimensions. Indirect piezoelectric effect is also shown in this paper, where on applying the electric field, material becomes strained and strain is directly proportional to electric field.

Keywords

Piezoelectric material Energy harvesting MEMS 

References

  1. 1.
    L. Lin and W. Yun, “MEMS Pressure Sensors for Aerospace Applications,” Proceeding IEEE Aerospace Conference, vol. 1, Colorado, 21–28, pp. 429–436, March 1998.Google Scholar
  2. 2.
    D. L. DeVoe and A. P. Pisano A P 2001 “Surface micromachined piezoelectric accelerometers (PiXLs)”, J. Microelectromech. Syst 10, pp. 180–6, 2001.Google Scholar
  3. 3.
    P. Muralt P, “Piezoelectric micromachined ultrasonic transducers based on PZT thin films”, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 52, 2276–88, 2006.Google Scholar
  4. 4.
    S. M. Peelamedu et al. (Proceedings of the Institution of Mechanical Engineers, Part I: Journal of Systems and Control Engineering March 1, 2000 vol. 214 no. 2 87–97).Google Scholar
  5. 5.
    J. Sirohi and I. Chopra, “Fundamental understanding of piezoelectric strain sensors,” J. Intell. Mater. Syst. Smart Struct., vol. 11, pp. 246–257, Apr. 2000.Google Scholar
  6. 6.
    H. A. Tinoco, A. L. Serpa, and A. M. Ramos, “Numerical study of the effects of bonding layer properties on electrical signatures of piezoelectric sensors,” Mecánica Comput., vol. 29, no. 86, pp. 8391–8409, Nov. 2010.Google Scholar
  7. 7.
    A. E. Kubba and K. Jiang, “Efficiency enhancement of a cantileverbased vibration energy harvester,” Sensors, vol. 14, no. 1, pp. 188–211,2014.Google Scholar
  8. 8.
    MacDonald N C, Chen L Y, Yao J J, Zhang Z L, McMillan J A, Thomas D C & Haselton K R, “Sensors and Actuators”, 20, (1989)19.Google Scholar
  9. 9.
    IEEE Standard on Piezoelectricity, ANSI/IEEE Standard 176, 1987.Google Scholar
  10. 10.
    A. Aini, A.N Nordin, H. Salleh, “A comparative study on MEMS piezoelectric microgenerators,” Microsyst Technol, 2010.Google Scholar
  11. 11.
    S. P. Beeby, M. J. Tudor and N. M. White, “Energy harvesting vibration sources for microsystems applications.” Meas. Sci. Technol. 2006; 17:R175–R195.Google Scholar

Copyright information

© Springer Nature Singapore Pte Ltd. 2018

Authors and Affiliations

  • Sachin Kala
    • 1
  • Varij Panwar
    • 1
  • Lokesh Panwar
    • 1
  • Sushant Sharma
    • 1
  1. 1.Graphic Era UniversityDehradunIndia

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