Abstract
In the recent years, MEMS technology, because of its micro-size, has matured as a field of research. Micro-gripper is one of the applications of MEMS technology. This paper describes the design, simulation and analysis of micro-gripper based on electrothermal actuator. An electrothermally actuated micro-gripper has been designed, optimized and simulated using COMSOL Multiphysics simulation tool. The simulation of the gripper design is done by using copper as a structural material. Different parametric studies have been carried out such as displacement, stress and deformation by varying the driving voltage and temperature.
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Acknowledgements
The authors would like to thank Hemant Kumar and COMSOL India for their software support, P. Banerjee, R Agrawal for discussions and BIT Mesra for resources.
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Chattoraj, N., Pasumarthy, A., Agarwal, R., Imam, A. (2018). Investigation of Microgripper Using Thermal Actuator. In: Nath, V. (eds) Proceedings of the International Conference on Microelectronics, Computing & Communication Systems. Lecture Notes in Electrical Engineering, vol 453. Springer, Singapore. https://doi.org/10.1007/978-981-10-5565-2_23
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DOI: https://doi.org/10.1007/978-981-10-5565-2_23
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