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Advances in Systems, Control and Automation pp 481–490Cite as

Design of a Piezoresistive Microaccelerometer with High Sensitivity for Medical Diagnostic

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Part of the book series: Lecture Notes in Electrical Engineering ((LNEE,volume 442))

Abstract

The design of a piezoresistive microaccelerometer and its performance analysis have been presented in this paper. The objective is to design a tremor diagnostic system operating at frequency range from 0.1 to 25 Hz and ±2 g. In this paper, mainly the analysis has been done based on the temperature effect, drift, and doping. The microaccelerometer designed has been simulated using the finite element method-based software COMSOL 4.3 with the following dimensions; proof mass: 3200 × 3200 × 250, flexure: 1000 × 250 × 20, frame: 5200 × 230 × 250, piezoresistor: 100 × 25 × 2 (all dimensions are in μm). Here basically, the impact of strain on the temperature and doping has been studied. Sensitivity is dependent upon the piezoresistive coefficient; therefore, the temperature and the doping concentration have a direct impact upon the sensitivity of the device. The designed microaccelerometer has a sensitivity of 10.5 mV/V/g, and Wheatstone bridge is employed as the signal pickup circuit to reduce the cross-axis sensitivity.

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Authors and Affiliations

  1. Department of Electronics and Electrical Engineering, Indian Institute of Technology Guwahati, Guwahati, 781039, India

    Sonali Biswas & Anup Kumar Gogoi

Authors
  1. Sonali Biswas
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  2. Anup Kumar Gogoi
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Correspondence to Sonali Biswas .

Editor information

Editors and Affiliations

  1. Clinical Engineering, University of Virginia Health System, Charlottesville, Virginia, USA

    Avinash Konkani

  2. Department of Electronics and Communication Engineering, Sikkim Manipal Institute of Technology(SMIT), Rangpo, Sikkim, India

    Rabindranath Bera

  3. Department of Energy Engineering, North-Eastern Hill University, Shillong, Megalaya, India

    Samrat Paul

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Biswas, S., Gogoi, A.K. (2018). Design of a Piezoresistive Microaccelerometer with High Sensitivity for Medical Diagnostic. In: Konkani, A., Bera, R., Paul, S. (eds) Advances in Systems, Control and Automation. Lecture Notes in Electrical Engineering, vol 442. Springer, Singapore. https://doi.org/10.1007/978-981-10-4762-6_46

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  • DOI: https://doi.org/10.1007/978-981-10-4762-6_46

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  • Publisher Name: Springer, Singapore

  • Print ISBN: 978-981-10-4761-9

  • Online ISBN: 978-981-10-4762-6

  • eBook Packages: EngineeringEngineering (R0)

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