Optimization of CNT Based MEMS Piezoresistive Pressure Sensor for Intracranial Pressure Monitoring

Abstract

Optimum design considerations for modified square diaphragm of intracranial pressure sensors are carried out using Taguchi method. The optimum slot sizes and diaphragm thickness are analyzes by taking into account the effects of maximum displacement and maximum stress of diaphragm. A new slots are introduced to replace typical square diaphragm for the maximization of displacement and stress on the diaphragm. It is found that the optimum design is as follows: thickness =2 µm, slot width =5µm, and slot length =8µm to achieve the result of increment of almost two folds in maximum displacement and more than 10 folds of maximum stress as compared to previous typical square diaphragm design.